A dual polarization optical 90°-hybrid in silicon-on-insulator waveguides

被引：0
|
作者：
Li, Yanping [1 ]
Hong, Tingting [1 ]
Wang, Ziyu [1 ]
机构：
[1] Peking Univ, State Key Lab Adv Opt Commun Syst & Networks, Beijing 100871, Peoples R China
来源：
OPTOELECTRONIC MATERIALS AND DEVICES V | 2011年 / 7987卷
关键词：
Dual polarization; 90; degrees-hybrid; Multi-mode interference coupler; Silicon-on-insulator; BEAM SPLITTER; ULTRACOMPACT; COUPLER;
D O I：
10.1117/12.888294
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An all-passive dual polarization optical 90 degrees-hybrid in silicon-on-insulator waveguides is proposed and designed. It consists of two 2x2 MMI-MZI structures, working as polarization beam splitters, and two 4 x 4 MMI couplers, working as 90 degrees-hybrids. The fabrication process includes only one step of inductively coupled plasma (ICP) etching. It is particularly suitable for silicon-based integration of DP-QPSK receiver.
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页数：7
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