Growth of Crystalline ZnO Films on the Nitridated (0001) Sapphire Surface

被引：7

作者：

Butashin, A. V. ^{[1
]}

Kanevsky, V. M. ^{[1
]}

Muslimov, A. E. ^{[1
]}

Prosekov, P. A. ^{[1
,4
]}

Kondratev, O. A. ^{[1
,4
]}

Blagov, A. E. ^{[1
,4
]}

Vasil'ev, A. L. ^{[1
,4
]}

Rakova, E. V. ^{[1
]}

Babaev, V. A. ^{[2
]}

Ismailov, A. M. ^{[2
]}

Vovk, E. A. ^{[3
]}

Nizhankovsky, S. V. ^{[3
]}

机构：

[1] Russian Acad Sci, Shubnikov Inst Crystallog, Moscow 119333, Russia

[2] Dagestan State Univ, Makhachkala 367000, Russia

[3] Natl Acad Sci Ukraine, Inst Single Crystals, UA-61103 Kharkov, Ukraine

[4] Natl Res Ctr, Kurchatov Inst, Moscow 123182, Russia

来源：

CRYSTALLOGRAPHY REPORTS | 2015年 / 60卷 / 04期

基金：

俄罗斯基础研究基金会;

关键词：

X-RAY; EPITAXIAL-FILMS; SUBSTRATE; DOMAINS;

D O I：

10.1134/S1063774515040094

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

The surface morphology and structure of (0001) sapphire substrates subjected to thermochemical nitridation in a mixture of N-2, DD, and De(2) gases are investigated by electron and probe microscopy and X-ray and electron diffraction. It is shown that an aluminum nitride layer is formed on the substrate surface and heteroepitaxial ZnO films deposited onto such substrates by magnetron sputtering have a higher quality when compared with films grown on sapphire.

引用

页码：565 / 569

页数：5

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