Growth of Crystalline ZnO Films on the Nitridated (0001) Sapphire Surface

被引：7

作者：

Butashin, A. V. ^{[1
]}

Kanevsky, V. M. ^{[1
]}

Muslimov, A. E. ^{[1
]}

Prosekov, P. A. ^{[1
,4
]}

Kondratev, O. A. ^{[1
,4
]}

Blagov, A. E. ^{[1
,4
]}

Vasil'ev, A. L. ^{[1
,4
]}

Rakova, E. V. ^{[1
]}

Babaev, V. A. ^{[2
]}

Ismailov, A. M. ^{[2
]}

Vovk, E. A. ^{[3
]}

Nizhankovsky, S. V. ^{[3
]}

机构：

[1] Russian Acad Sci, Shubnikov Inst Crystallog, Moscow 119333, Russia

[2] Dagestan State Univ, Makhachkala 367000, Russia

[3] Natl Acad Sci Ukraine, Inst Single Crystals, UA-61103 Kharkov, Ukraine

[4] Natl Res Ctr, Kurchatov Inst, Moscow 123182, Russia

来源：

CRYSTALLOGRAPHY REPORTS | 2015年 / 60卷 / 04期

基金：

俄罗斯基础研究基金会;

关键词：

X-RAY; EPITAXIAL-FILMS; SUBSTRATE; DOMAINS;

D O I：

10.1134/S1063774515040094

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

The surface morphology and structure of (0001) sapphire substrates subjected to thermochemical nitridation in a mixture of N-2, DD, and De(2) gases are investigated by electron and probe microscopy and X-ray and electron diffraction. It is shown that an aluminum nitride layer is formed on the substrate surface and heteroepitaxial ZnO films deposited onto such substrates by magnetron sputtering have a higher quality when compared with films grown on sapphire.

引用

页码：565 / 569

页数：5

共 50 条

[21] A first-principles study on Al-doped ZnO growth polarity on sapphire (0001) surface
Yang, Ping
Gao, Qian
Hu, Zhen-Peng
Zhang, Li-Xin
EPL, 2016, 114 (06)
[22] Growth and properties of InGaN and AlInGaN thin films on (0001) Sapphire
Electrical Engineering Department, North Carolina State University, United States
MRS Internet J. Nitride Semicond. Res., (6d):
[23] Growth and properties of InGaN and AlInGaN thin films on (0001)sapphire
Piner, EL
McIntosh, FG
Roberts, JC
Aumer, ME
Joshkin, VA
Bedair, SM
ElMasry, NA
MRS INTERNET JOURNAL OF NITRIDE SEMICONDUCTOR RESEARCH, 1996, 1 (1-46): : U333 - U339
[24] Growth of nanostructured ZnO thin films on sapphire
R.P. Doherty
Yuekui Sun
Ye Sun
J.L. Warren
N.A. Fox
D. Cherns
M.N.R. Ashfold
Applied Physics A, 2007, 89 : 49 - 55
[25] Growth of nanostructured ZnO thin films on sapphire
Doherty, R. P.
Sun, Yuekui
Sun, Ye
Warren, J. L.
Fox, N. A.
Cherns, D.
Ashfold, M. N. R.
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2007, 89 (01): : 49 - 55
[26] Comparisons of structural and optical properties of ZnO films grown on (0001) sapphire and GaN/(0001) sapphire template by atmospheric-pressure MOCVD
Dai, JN
Liu, HH
Fang, WQ
Wang, L
Pu, Y
Jiang, FY
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2006, 127 (2-3): : 280 - 284
[27] Textured ZnO Thin Films on (0001) Sapphire Produced by Chemical Solution Deposition
B Wessler
F F. Lange
W. Mader
Journal of Materials Research, 2002, 17 : 1644 - 1650
[28] Textured ZnO thin films on (0001) sapphire produced by chemical solution deposition
Wessler, B
Lange, FF
Mader, W
JOURNAL OF MATERIALS RESEARCH, 2002, 17 (07) : 1644 - 1650
[29] Defect reduction by epitaxial lateral overgrowth of nanorods in ZnO/(0001) sapphire films
Cherns, D.
Sun, Y.
APPLIED PHYSICS LETTERS, 2008, 92 (05)
[30] Improvement of the crystalline quality of InN layers grown on sapphire (0001) by surface nitridation
Tsuchiya, T
Yamano, H
Miki, O
Wakahara, A
Yoshida, A
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (4A): : 1884 - 1887

← 1 2 3 4 5 →