Research on the Resonant Frequency Formula of V-Shaped Cantilevers

被引：7

作者：

Yang, Kai ^{[1
]}

Li, Zhigang ^{[1
]}

Jing, Yupeng ^{[1
]}

Chen, Dapeng ^{[1
]}

Ye, Tianchun ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Microelect, Lab Silicon Devices & Integrated Technol, Beijing 100864, Peoples R China

来源：

2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1 AND 2 | 2009年

关键词：

cantilever; fundamental resonant frequency; triangular; V-shaped;

D O I：

10.1109/NEMS.2009.5068527

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper deduces a remarkably precise analytical formula for calculating the fundamental resonant frequency of V-shaped cantilevers using Rayleigh-Ritz method. This analytical formula, which is very convenient for MEMS sensor design, is then validated by ANSYS simulation. This formula raises a new perspective that, among all the V-shaped cantilevers, the simplest triangular cantilever can lead to maximum resonant frequency and highest sensitivity.

引用

页码：59 / 62

页数：4

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