V-shaped metallic-wire cantilevers for combined atomic force microscopy and Fowler-Nordheim imaging

被引:4
|
作者
Peterson, CA [1 ]
Workman, RK [1 ]
Yao, XW [1 ]
Hunt, JP [1 ]
Sarid, D [1 ]
机构
[1] Univ Arizona, Ctr Opt Sci, Tucson, AZ 85721 USA
关键词
D O I
10.1088/0957-4484/9/4/005
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A method for fabricating V-shaped cantilevers from a flattened Pt/ir metal wire for combined atomic force microscopy and Fowler-Nordheim imaging is described. These novel cantilevers have been found to be more robust then conventional ones used for scanning capacitance and magnetic force microscopy as their conductivity is maintained even after a large number of surface scans. The use of a V-shaped geometry improves on earlier single-beam geometries by reducing rms imaging noise. Characterization of these cantilevers and combined atomic force microscopy and Fowler-Nordheim images are reported.
引用
收藏
页码:331 / 336
页数:6
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