Research on the Resonant Frequency Formula of V-Shaped Cantilevers

被引：7
|
作者：
Yang, Kai [1 ]
Li, Zhigang [1 ]
Jing, Yupeng [1 ]
Chen, Dapeng [1 ]
Ye, Tianchun [1 ]
机构：
[1] Chinese Acad Sci, Inst Microelect, Lab Silicon Devices & Integrated Technol, Beijing 100864, Peoples R China
来源：
2009 4TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1 AND 2 | 2009年
关键词：
cantilever; fundamental resonant frequency; triangular; V-shaped;
D O I：
10.1109/NEMS.2009.5068527
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper deduces a remarkably precise analytical formula for calculating the fundamental resonant frequency of V-shaped cantilevers using Rayleigh-Ritz method. This analytical formula, which is very convenient for MEMS sensor design, is then validated by ANSYS simulation. This formula raises a new perspective that, among all the V-shaped cantilevers, the simplest triangular cantilever can lead to maximum resonant frequency and highest sensitivity.
引用
收藏
页码：59 / 62
页数：4
相关论文
共 50 条
  • [41] Efficiency Enhancement of a V-Shaped Evaporator
    Xu, Haijing
    Zhang, Xinyu
    Zhang, Wenxing
    Meyer, D. M. L.
    Zhang, Zongqin
    2017 ASHRAE ANNUAL CONFERENCE PAPERS, 2017,
  • [42] Fracture of components with V-shaped notches
    Gómez, FJ
    Elices, M
    ENGINEERING FRACTURE MECHANICS, 2003, 70 (14) : 1913 - 1927
  • [43] V-shaped apple planting systems
    Robinson, TL
    PROCEEDINGS OF THE XXVTH INTERNATIONAL HORTICULTURAL CONGRESS, PT 3: CULTURE TECHNIQUES WITH SPECIAL EMPHASIS ON ENVIRONMENTAL IMPLICATIONS, 2000, (513): : 337 - 347
  • [44] Analysis of the set of V-shaped schedules
    Al-Turki, UM
    ARABIAN JOURNAL FOR SCIENCE AND ENGINEERING, 2001, 26 (1B): : 59 - 67
  • [45] On the collision of a droplet with a V-shaped wall
    Wu, Guoqiang
    Chen, Sheng
    Du, Wenhui
    Zeng, Sibo
    Yu, Yang
    Zhai, Shuai
    Wang, Yu
    INTERNATIONAL COMMUNICATIONS IN HEAT AND MASS TRANSFER, 2022, 137
  • [46] A NOTE ON GENERATION OF V-SHAPED SEQUENCES
    PANWALKER, SS
    COMPUTERS & INDUSTRIAL ENGINEERING, 1991, 20 (04) : 421 - 423
  • [47] Fractional Laplacian in V-shaped waveguide
    Bakharev, Fedor
    Matveenko, Sergey
    MATHEMATISCHE NACHRICHTEN, 2025, 298 (02) : 427 - 436
  • [48] V-shaped wings in supersonic flow
    Maksimov, F. A.
    Ostapenko, N. A.
    Zubin, M. A.
    PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART G-JOURNAL OF AEROSPACE ENGINEERING, 2022, 236 (03) : 437 - 447
  • [49] Simulation of v-shaped stability in AFLC
    Adamski, A
    Pauwels, H
    Neyts, K
    Desimpel, C
    Vermael, S
    XIV CONFERENCE ON LIQUID CRYSTALS: CHEMISTRY, PHYSICS, AND APPLICATIONS, 2001, 4759 : 127 - 134
  • [50] Creating V-shaped optical antennas
    Denisyuk, A. I.
    JOURNAL OF OPTICAL TECHNOLOGY, 2010, 77 (09) : 527 - 529
12345