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- [31] Self-Aligned Chip-to-Chip Optical Interconnections in Ultra-Thin 3D Glass Interposers 2015 IEEE 65TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), 2015, : 804 - 809
- [32] Room Temperature and Zero Pressure High Quality Oxide Direct Bonding for 3D Self-Aligned Assembly 2014 IEEE 16TH ELECTRONICS PACKAGING TECHNOLOGY CONFERENCE (EPTC), 2014, : 579 - 582
- [34] TWO NOVEL MEMS ACTUATOR SYSTEMS FOR SELF-ALIGNED INTEGRATED 3D OPTICAL COHERENT TOMOGRAPHY SCANNERS 30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 2017, : 797 - 800
- [37] 2D Self-Aligned Via Patterning Strategy with EUV Single Exposure in 3nm Technology EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY VIII, 2017, 10143
- [38] MASSIVE PARALLEL NEMS FLOW RESTRICTION FABRICATED USING SELF-ALIGNED 3D-CRYSTALLOGRAPHIC NANOLITHOGRAPHY 2020 33RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2020), 2020, : 1106 - 1109