Lithographical bending control method for a piezoelectric actuator

被引：2

作者：

Ikehashi, Tamio ^{[1
]}

Ogawa, Etsuji ^{[1
]}

Yamazaki, Hiroaki ^{[1
]}

Ohguro, Tatsuya ^{[1
]}

机构：

[1] Semicond Co, Toshiba Corp, Ctr Semicond R&D, Yokohama, Kanagawa, Japan

来源：

INTERNATIONAL JOURNAL OF MICROWAVE AND WIRELESS TECHNOLOGIES | 2009年 / 1卷 / 01期

关键词：

MEMS; Piezoelectric actuator; PZT; Bending; LBC; MEMS; EQUATIONS;

D O I：

10.1017/S1759078709000051

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the theoretical formulation of a lithographical bending control (LBC) method that uses lithographical degrees of freedom to control the bending of a multilayered beam. LBC is applied to a piezoelectric actuator that uses PZT as the piezoelectric material. The theoretical model is compared with measurements using a weakly fixed bridge structure suited for curvature measurement.

引用

页码：37 / 42

页数：6

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