Lithographical bending control method for a piezoelectric actuator

被引：2
|
作者：
Ikehashi, Tamio [1 ]
Ogawa, Etsuji [1 ]
Yamazaki, Hiroaki [1 ]
Ohguro, Tatsuya [1 ]
机构：
[1] Semicond Co, Toshiba Corp, Ctr Semicond R&D, Yokohama, Kanagawa, Japan
来源：
INTERNATIONAL JOURNAL OF MICROWAVE AND WIRELESS TECHNOLOGIES | 2009年 / 1卷 / 01期
关键词：
MEMS; Piezoelectric actuator; PZT; Bending; LBC; MEMS; EQUATIONS;
D O I：
10.1017/S1759078709000051
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents the theoretical formulation of a lithographical bending control (LBC) method that uses lithographical degrees of freedom to control the bending of a multilayered beam. LBC is applied to a piezoelectric actuator that uses PZT as the piezoelectric material. The theoretical model is compared with measurements using a weakly fixed bridge structure suited for curvature measurement.
引用
收藏
页码：37 / 42
页数：6
相关论文
共 50 条
  • [21] A trapezoidal bending piezoelectric multilayer actuator by screen printing technology
    Zhu, WG
    Wang, ZH
    Zhang, Z
    FERROELECTRICS, 2001, 263 (1-4) : 1467 - 1472
  • [22] A shear-bending mode high temperature piezoelectric actuator
    Chen, Jianguo
    Li, Xiaotian
    Liu, Guoxi
    Chen, Zhijiang
    Dong, Shuxiang
    APPLIED PHYSICS LETTERS, 2012, 101 (01)
  • [23] A rotary piezoelectric actuator using longitudinal and bending hybrid transducer
    Liu, Yingxiang
    Yang, Xiaohui
    Chen, Weishan
    Liu, Junkao
    AIP ADVANCES, 2012, 2 (04):
  • [24] BENDING OF LAMINATED PIEZOELECTRIC CANTILEVER ACTUATOR UNDER CONSTANT VOLTAGE
    Huang, De-jin
    Ding, Hao-jiang
    Chen, Wei-qiu
    PROCEEDINGS OF THE 2008 SYMPOSIUM ON PIEZOELECTRICITY, ACOUSTIC WAVES AND DEVICE APPLICATIONS, 2008, : 213 - +
  • [25] Contribution to The Study of Piezoelectric Beam Bending Actuator in Harmonic Mode
    Regaz, A.
    Boukezzi, L.
    Zegnini, B.
    Mahi, D.
    2017 5TH INTERNATIONAL CONFERENCE ON ELECTRICAL ENGINEERING - BOUMERDES (ICEE-B), 2017,
  • [26] Investigation of Piezoelectric Bending Actuator for Application in Kinetic Energy Harvesting
    Dauksevicius, R.
    Milasauskaite, I.
    Ostasevicius, V.
    Gaidys, R.
    MECHANIKA 2012: PROCEEDINGS OF THE 17TH INTERNATIONAL CONFERENCE, 2012, : 48 - +
  • [27] A bending hybrid linear piezoelectric actuator using sectional excitation
    Zhang, Qiang
    Chen, Hongjuan
    Liu, Yingxiang
    Wang, Wenzhi
    Zhang, Hu
    Zhou, Xiangyu
    Chen, Dongliang
    Wang, Monan
    SENSORS AND ACTUATORS A-PHYSICAL, 2018, 271 : 96 - 103
  • [28] Adaptive Control of Piezoelectric Walker Actuator
    Golubovic, Edin
    Uzunovic, Tarik
    Zhakypov, Zhenishbek
    Sabanovic, Asif
    2013 IEEE INTERNATIONAL CONFERENCE ON MECHATRONICS (ICM), 2013,
  • [29] Robust tracking control for a piezoelectric actuator
    Salah, M.
    McIntyre, M.
    Dawson, D.
    Wagner, J.
    2007 AMERICAN CONTROL CONFERENCE, VOLS 1-13, 2007, : 2127 - +
  • [30] Model and Control on Hysteresis of Piezoelectric Actuator
    Ji Huawei
    Wen Yongqing
    MATERIALS SCIENCE AND ENGINEERING, PTS 1-2, 2011, 179-180 : 635 - 640
12345