Lithographical bending control method for a piezoelectric actuator

被引：2
|
作者：
Ikehashi, Tamio [1 ]
Ogawa, Etsuji [1 ]
Yamazaki, Hiroaki [1 ]
Ohguro, Tatsuya [1 ]
机构：
[1] Semicond Co, Toshiba Corp, Ctr Semicond R&D, Yokohama, Kanagawa, Japan
来源：
INTERNATIONAL JOURNAL OF MICROWAVE AND WIRELESS TECHNOLOGIES | 2009年 / 1卷 / 01期
关键词：
MEMS; Piezoelectric actuator; PZT; Bending; LBC; MEMS; EQUATIONS;
D O I：
10.1017/S1759078709000051
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents the theoretical formulation of a lithographical bending control (LBC) method that uses lithographical degrees of freedom to control the bending of a multilayered beam. LBC is applied to a piezoelectric actuator that uses PZT as the piezoelectric material. The theoretical model is compared with measurements using a weakly fixed bridge structure suited for curvature measurement.
引用
收藏
页码：37 / 42
页数：6
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