A 3V operation RF MEMS variable capacitor using piezoelectric and electrostatic actuation with lithographical bending control

被引：0
|
作者：
Ikehashi, T. [1 ]
Ogawa, E. [1 ]
Yamazaki, H. [1 ]
Ohguro, T. [1 ]
机构：
[1] Toshiba Corp Semicond Co, Ctr Semicond Res & Dev, Yokohama, Kanagawa, Japan
来源：
TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2007年
关键词：
RF MEMS; variable capacitor; piezoelectric; PZT; bending;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A 3V operation RF MEMS variable capacitor using hybrid actuation of piezoelectric and electrostatic forces is presented. Bending of the piezoelectric actuator is controlled by a lithographical pattern formed on top of the actuator. The hybrid actuation and the optimized bending enabled 2.6V pull-in voltage with the pull-out voltage as high as 2.0V. The measured capacitance ratio is 14.
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页数：2
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