Epitaxial growth of cadmium telluride films on silicon with a buffer silicon carbide layer

被引:4
|
作者
Antipov, V. V. [1 ,2 ]
Kukushkin, S. A. [1 ,3 ,4 ]
Osipov, A. V. [1 ,3 ]
机构
[1] Russian Acad Sci, Inst Problems Machine Engn, Bolshoi Pr 61, St Petersburg 199178, Russia
[2] Tech Univ, St Petersburg State Inst Technol, Moskovskii Pr 26, St Petersburg 190013, Russia
[3] St Petersburg Natl Res Univ Informat Technol Mech, Kronverkskii Pr 49, St Petersburg 197101, Russia
[4] Peter Great St Petersburg State Polytech Univ, Politekhnicheskaya Ul 29, St Petersburg 195251, Russia
关键词
CDTE THIN-FILMS; SOLAR-CELLS; NUCLEATION;
D O I
10.1134/S1063783417020020
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
An epitaxial 1-3-mu m-thick cadmium telluride film has been grown on silicon with a buffer silicon carbide layer using the method of open thermal evaporation and condensation in vacuum for the first time. The optimum substrate temperature was 500A degrees C at an evaporator temperature of 580A degrees C, and the growth time was 4 s. In order to provide more qualitative growth of cadmium telluride, a high-quality similar to 100-nm-thick buffer silicon carbide layer was previously synthesized on the silicon surface using the method of topochemical substitution of atoms. The ellipsometric, Raman, X-ray diffraction, and electron-diffraction analyses showed a high structural perfection of the CdTe layer in the absence of a polycrystalline phase.
引用
收藏
页码:399 / 402
页数:4
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