Characterization of PZT thin films prepared by a modified sol-gel method

被引：8

作者：

Matthes, B ^{[1
]}

Tomandl, G ^{[1
]}

Werner, G ^{[1
]}

机构：

[1] Freiberg Univ Min & Technol, Inst Ceram Mat, D-09596 Freiberg, Germany

来源：

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 1999年 / 19卷 / 6-7期

关键词：

sol-gel processes; PZT;

D O I：

10.1016/S0955-2219(98)00442-7

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Lead zirconate titanate (PZT) thin films with thicknesses of around 5 mu m were prepared by the deposition a sol slurry. This sol slurry consists of a PZT-sol on acetic acid basis and PZT powder. The sol serves as the dispersion agent of the powder. Both are identical in composition with molar ratio Zr/Ti of 0.53/0.47. Lead in excess of 5% was used in all samples. This coating conditions enhance the possibilities of film preparation. (C) 1999 Elsevier Science Limited. All rights reserved.

引用

下载

页码：1387 / 1389

页数：3

共 50 条

[41] Microstructure of PZT/PT thin films prepared by sol-gel process and microwave annealing
Chinese Acad of Sciences, Shanghai, China
Phys Status Solidi A, 2 (779-784):
[42] Dielectric and electromechanical properties of sol-gel prepared PZT thin films on metallic substrates
Seifert, S
Sporn, D
Hauke, T
Müller, G
Beige, H
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2004, 24 (09) : 2553 - 2566
[43] Study on heating rate in crystallization of PZT thin films prepared by the sol-gel process
He, Jinlin
Tan, Hong
Wang, Dacheng
Gongneng Cailiao/Journal of Functional Materials, 1997, 28 (01): : 50 - 51
[44] Preparation and characterization of sol-gel derived PZT thin films for micro actuators
Wang, ZJ
Maeda, R
Kikuchi, K
DESIGN, TEST, AND MICROFABRICATION OF MEMS AND MOEMS, PTS 1 AND 2, 1999, 3680 : 948 - 955
[45] Preparation of PZT thin films for low voltage application by sol-gel method
Soyama, N
Maki, K
Mori, S
Ogi, K
PROCEEDINGS OF THE 2001 12TH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, VOLS I AND II, 2001, : 611 - 614
[46] Preparation of Al doped PZT thin films using a sol-gel method
Iijima, T
Sanada, N
Hiyama, K
Tsuboi, H
Okada, M
FERROELECTRIC THIN FILMS VIII, 2000, 596 : 223 - 228
[47] MICROSTRUCTURE CHARACTERIZATION OF SOL-GEL DERIVED PZT FILMS
HIGUCHI, K
MIYAZAWA, K
SAKUMA, T
SUZUKI, K
JOURNAL OF MATERIALS SCIENCE, 1994, 29 (02) : 436 - 441
[48] Electrochromic and electrochemical properties of nickel oxide thin films prepared by a modified sol-gel method
Xia, X. H.
Tu, J. P.
Zhang, J.
Wang, X. L.
MULTI-FUNCTIONAL MATERIALS AND STRUCTURES, PTS 1 AND 2, 2008, 47-50 : 625 - 629
[49] Ferroelectric and dielectric behaviors of PLZT/PZT multi-layered thin films prepared by sol-gel method
Hwang, JY
Jeong, SY
Cho, CR
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2003, 42 : S1093 - S1096
[50] Characterization of iron oxide thin films prepared by sol-gel processing
Karakuscu, Aylin
Ozenbas, Macit
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2008, 8 (02) : 901 - 906

← 1 2 3 4 5 →