Characterization of PZT thin films prepared by a modified sol-gel method

被引：8
|
作者：
Matthes, B [1 ]
Tomandl, G [1 ]
Werner, G [1 ]
机构：
[1] Freiberg Univ Min & Technol, Inst Ceram Mat, D-09596 Freiberg, Germany
来源：
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 1999年 / 19卷 / 6-7期
关键词：
sol-gel processes; PZT;
D O I：
10.1016/S0955-2219(98)00442-7
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Lead zirconate titanate (PZT) thin films with thicknesses of around 5 mu m were prepared by the deposition a sol slurry. This sol slurry consists of a PZT-sol on acetic acid basis and PZT powder. The sol serves as the dispersion agent of the powder. Both are identical in composition with molar ratio Zr/Ti of 0.53/0.47. Lead in excess of 5% was used in all samples. This coating conditions enhance the possibilities of film preparation. (C) 1999 Elsevier Science Limited. All rights reserved.
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页码：1387 / 1389
页数：3
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