Effect of wall reflection on the determination of electron temperature by the line-ratio method in inductively coupled plasmas

被引：4
|
作者：
Pu, YK [1 ]
Yu, ZD [1 ]
Guo, ZG [1 ]
机构：
[1] Tsinghua Univ, Dept Engn Phys, Beijing 100084, Peoples R China
来源：
PHYSICS OF PLASMAS | 2005年 / 12卷 / 11期
基金：
中国国家自然科学基金;
关键词：
D O I：
10.1063/1.2124527
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
The light collected from inductively coupled CH4/N-2 and N-2 plasmas is strongly affected by wall reflection. Since wall reflectivity varies with wavelength, the effect can lead to a significant error in the electron temperature determined by the line-ratio method. (C) 2005 American Institute of Physics.
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收藏
页码：1 / 3
页数：3
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