Functional Probes for Scanning Probe Microscopy

被引：0
|
作者：
Akiyama, K. [1 ]
Eguchi, T. [1 ]
Hamada, M. [1 ]
An, T. [1 ]
Fujikawa, Y. [1 ]
Hasegawa, Y. [1 ]
Sakurai, T. [1 ]
机构：
[1] Tohoku Univ, Inst Mat Res, Aoba Ku, 2-1-1 Katahira, Sendai, Miyagi 9808577, Japan
来源：
FRONTIERS IN MATERIALS RESEARCH | 2008年 / 10卷
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D O I：
暂无
中图分类号：
X [环境科学、安全科学];
学科分类号：
08 ; 0830 ;
摘要：
Functional probes for scanning probe microscopy (SPM) were fabricated with focused ion beam (FIB) method. Metal-tip cantilevers were fabricated for Kelvin probe force microscopy (KFM) and glass-coated tungsten tips were fabricated for scanning tunneling microscopy under irradiation of synchrotron-radiation light (SR-STM). Here we report the fabrication process and the characterization of those functional probes.
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页码：305 / +
页数：2
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