Functional Probes for Scanning Probe Microscopy

被引：0

作者：

Akiyama, K. ^{[1
]}

Eguchi, T. ^{[1
]}

Hamada, M. ^{[1
]}

An, T. ^{[1
]}

Fujikawa, Y. ^{[1
]}

Hasegawa, Y. ^{[1
]}

Sakurai, T. ^{[1
]}

机构：

[1] Tohoku Univ, Inst Mat Res, Aoba Ku, 2-1-1 Katahira, Sendai, Miyagi 9808577, Japan

来源：

FRONTIERS IN MATERIALS RESEARCH | 2008年 / 10卷

关键词：

D O I：

暂无

中图分类号：

X [环境科学、安全科学];

学科分类号：

08 ; 0830 ;

摘要：

Functional probes for scanning probe microscopy (SPM) were fabricated with focused ion beam (FIB) method. Metal-tip cantilevers were fabricated for Kelvin probe force microscopy (KFM) and glass-coated tungsten tips were fabricated for scanning tunneling microscopy under irradiation of synchrotron-radiation light (SR-STM). Here we report the fabrication process and the characterization of those functional probes.

引用

页码：305 / +

页数：2

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