Anomalous dislocation annihilation behavior observed in a GaN crystal grown on point seeds by the Na-flux method

被引:13
|
作者
Imanishi, Masayuki [1 ]
Okumura, Kanako [1 ]
Nakamura, Kousuke [1 ]
Kitamura, Tomoko [1 ]
Kakinouchi, Keisuke [1 ]
Murakami, Kosuke [1 ]
Yoshimura, Masashi [2 ]
Fujita, Yu [3 ]
Tsusaka, Yoshiyuki [3 ]
Matsui, Junji [4 ]
Mori, Yusuke [1 ]
机构
[1] Osaka Univ, Div Elect Elect & Informat Engn, Suita, Osaka 5650871, Japan
[2] Osaka Univ, Inst Laser Engn, Suita, Osaka 5650871, Japan
[3] Univ Hyogo, Grad Sch Mat Sci, 3-2-1 Kouto, Kamigori, Hyogo 6781297, Japan
[4] Univ Hyogo, Synchrotron Radiat Nanotechnol Ctr, 1-490-2,Kouto,Shingu Cho, Tatsuno, Hyogo 6795165, Japan
基金
日本科学技术振兴机构;
关键词
SINGLE-CRYSTALS; LASER-DIODES; REDUCTION; EPITAXY;
D O I
10.35848/1882-0786/aba58e
中图分类号
O59 [应用物理学];
学科分类号
摘要
We recently invented a method called the flux-film-coated technique for purifying a GaN wafer with low dislocation density grown from point-seed crystals. In this study, we investigated the mechanism behind the reduction of dislocation density in the GaN wafer by evaluating the three-dimensional behavior of dislocations using multiphoton-excitation photoluminescence images. We made the surprising discovery that dislocations more than 50 mu m away disappeared by annihilating each other as growth proceeded, and this is one of the mechanisms underlying the dislocation density reduction. The moving distance of dislocations before annihilation is uncommon and a unique phenomenon in the Na-flux method. (c) 2020 The Japan Society of Applied Physics
引用
收藏
页数:5
相关论文
共 50 条
  • [1] Growth of a High Quality GaN Wafer from Point Seeds by the Na-Flux Method
    Imanishi, Masayuki
    Usami, Shigeyoshi
    Maruyama, Mihoko
    Yoshimura, Masashi
    Mori, Yusuke
    PROCEEDINGS OF AM-FPD 21: THE TWENTY-EIGHTH INTERNATIONAL WORKSHOP ON ACTIVE-MATRIX FLATPANEL DISPLAYS AND DEVICES - TFT TECHNOLOGIES AND FPD MATERIALS, 2021, : 70 - 72
  • [2] Recent progress of Na-flux method for GaN crystal growth
    Mori, Yusuke
    Imanishi, Masayuki
    Murakami, Kosuke
    Yoshimura, Masashi
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2019, 58
  • [3] Suppression of polycrystal nucleation by methane addition at moderate timing to maintain GaN crystal growth on point seeds in the Na-flux method
    Hamada, Kazuma
    Imanishi, Masayuki
    Murakami, Kosuke
    Usami, Shigeyoshi
    Maruyama, Mihoko
    Yoshimura, Masashi
    Mori, Yusuke
    JOURNAL OF CRYSTAL GROWTH, 2024, 627
  • [4] Investigation of oxygen impurity in different growth zones of GaN crystal grown by Na-flux method
    Gu, Hong
    Liu, Zongliang
    Dong, Xiaoming
    Gao, Xiaodong
    Tian, Feifei
    Wang, Jianfeng
    Xu, Ke
    JOURNAL OF CRYSTAL GROWTH, 2020, 544
  • [5] Dislocation evolution along the growth direction of 2-inch GaN crystal grown by Na-flux LPE
    Yang, Tao
    Hao, Hangfei
    Yin, Yucong
    Yang, Chen
    Feng, Maorong
    Ma, Ming
    Fan, Shiji
    Li, Zhenrong
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2021, 126
  • [6] Control of Growth Facets and Dislocation Propagation Behavior in the Na-Flux Growth of GaN
    Imade, Mamoru
    Hirabayashi, Yasuhiro
    Miyoshi, Naoya
    Yoshimura, Masashi
    Kitaoka, Yasuo
    Sasaki, Takatomo
    Mori, Yusuke
    CRYSTAL GROWTH & DESIGN, 2011, 11 (06) : 2346 - 2350
  • [7] Vacancy-type defects in bulk GaN grown by the Na-flux method probed using positron annihilation
    Uedono, Akira
    Imanishi, Masayuki
    Imade, Mamoru
    Yoshimura, Masashi
    Ishibashi, Shoji
    Sumiya, Masatomo
    Mori, Yusuke
    JOURNAL OF CRYSTAL GROWTH, 2017, 475 : 261 - 265
  • [8] Coalescence Growth of Dislocation-Free GaN Crystals by the Na-Flux Method
    Imanishi, Masayuki
    Murakami, Kosuke
    Imabayashi, Hiroki
    Takazawa, Hideo
    Todoroki, Yuma
    Matsuo, Daisuke
    Maruyama, Mihoko
    Imade, Mamoru
    Yoshimura, Masashi
    Mori, Yusuke
    APPLIED PHYSICS EXPRESS, 2012, 5 (09)
  • [9] Control of GaN crystal habit by solution stirring in the Na-flux method
    Murakami, Kosuke
    Imade, Mamoru
    Imanishi, Masayuki
    Honjo, Masatomo
    Imabayashi, Hiroki
    Matsuo, Daisuke
    Nakamura, Kosuke
    Maruyama, Mihoko
    Yoshimura, Masashi
    Mori, Yusuke
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2017, 56 (01)
  • [10] Enhancement of lateral growth of the GaN crystal with extremely low dislocation density during the Na-flux growth on a point seed
    Hayashi, Masatoshi
    Imanishi, Masayuki
    Yamada, Takumi
    Matsuo, Daisuke
    Murakami, Kosuke
    Maruyama, Mihoko
    Imade, Mamoru
    Yoshimura, Masashi
    Mori, Yusuke
    JOURNAL OF CRYSTAL GROWTH, 2017, 468 : 827 - 830