Solution-Processed Hybrid Ambipolar Thin-Film Transistors Fabricated at Low Temperature

被引:3
|
作者
Jeon, Jun-Young [1 ]
Yu, Byoung-Soo [1 ]
Kim, Yong-Hoon [2 ,3 ]
Ha, Tae-Jun [1 ]
机构
[1] Kwangwoon Univ, Dept Elect Mat Engn, Seoul 01897, South Korea
[2] Sungkyunkwan Univ, Sch Adv Mat Sci & Engn, Suwon 16419, South Korea
[3] Sungkyunkwan Univ, SKKU Adv Inst Nanotechnol St, Suwon 16419, South Korea
基金
新加坡国家研究基金会;
关键词
Hybrid ambipolar TFTs; SWCNTs; IGZO; Solution process; Deep ultraviolet photo annealing; P-TYPE; PLASMA TREATMENT; GATE INSULATOR; OXIDE; PERFORMANCE; SNO;
D O I
10.1007/s13391-019-00142-x
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We demonstrate solution-processed hybrid ambipolar thin-film transistors (TFTs) employing a stack structure composed of indium-gallium-zinc-oxide (IGZO) and single-wall carbon nanotube (SWCNT) as an active channel fabricated at low temperature. With an optimized deep-ultraviolet (DUV) photo annealing process for sol-gel based IGZO thin film on SWCNT random networks, the ambipolar transport of both electrons and holes with good electrical characteristics was realized. We also investigate the effect of DUV photo annealing on the material characteristics of solution-processed hybrid stack films and on the device performance of solution-processed hybrid ambipolar TFTs compared to those of samples thermally annealed at 500 degrees C, which is required for solution-processed high-qualityIGZO thin films. The Raman spectra show that DUV photo annealing ensures hole transport in SWCNT random networks of a hybrid stack film, where the intensity of the 2D peak to the G peak was not changed compared to that of pristine SWCNT random networks. We believe that these analytical investigations reveal that DUV photo annealing is a promising method by which to realize hybrid ambipolar SWCNT/IGZO TFTs fabricated at low temperature. [GRAPHICS] .
引用
收藏
页码:402 / 408
页数:7
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