Dual-wavelength method for measuring the thickness of HSQ photoresist

被引：0
|
作者：
Yao Shun [1 ]
Yu Bo [1 ]
Jin Jingcheng [1 ]
Li Chun [1 ]
机构：
[1] Chinese Acad Sci, Changchun Inst Opt & Fine Mech, State Key Lab Appl Opt, Changchun 130033, Peoples R China
来源：
8TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGY: OPTICAL TEST, MEASUREMENT TECHNOLOGY, AND EQUIPMENT | 2016年 / 9684卷
关键词：
Dual-wavelength method; Photoresist; Spectroscopic ellipsometer;
D O I：
10.1117/12.2246196
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The reflectivity of thin film changes periodically with the increase of its thickness. According to this effect, we present a dual-wavelength method for measuring the thickness of HSQ film. At first, the refractive index of HSQ was measured by a spectroscopic ellipsometer. Then the relationship between the thickness of HSQ and the reflectivity was deduced. At last, the thickness of HSQ was calculated using the reflectivity measured by a spectrograph. The method was proved to be simple and effective.
引用
收藏
页数：6
相关论文
共 50 条
  • [21] Storage of 1000 holograms with use of a dual-wavelength method
    Chuang, E
    Psaltis, D
    APPLIED OPTICS, 1997, 36 (32): : 8445 - 8454
  • [22] IMPROVED MOLE RATIO METHOD BY DUAL-WAVELENGTH SPECTROPHOTOMETRY
    ZHOU, N
    HE, CX
    ANALYST, 1993, 118 (08) : 1077 - 1080
  • [23] DUAL-WAVELENGTH SPECTROPHOTOMETRY .I. GENERAL METHOD
    SHIBATA, S
    FURUKAWA, M
    GOTO, K
    ANALYTICA CHIMICA ACTA, 1969, 46 (02) : 271 - &
  • [24] The Dual-Wavelength Method for Hailstorm Detection by Airborne Radar
    Louf, Valentin
    Pujol, Olivier
    Sauvageot, Henri
    Riedi, Jerome
    IEEE TRANSACTIONS ON GEOSCIENCE AND REMOTE SENSING, 2014, 52 (11): : 7327 - 7335
  • [25] A dual-wavelength radar technique for measuring the turbulent energy dissipation rate ε
    VanZandt, TE
    Clark, WL
    Gage, KS
    Williams, CR
    Ecklund, WL
    GEOPHYSICAL RESEARCH LETTERS, 2000, 27 (16) : 2537 - 2540
  • [26] A novel dual-wavelength iterative method for generalized dual-wavelength phase-shifting interferometry with second-order harmonics
    Xu, Xiaoqing
    Wang, Yawei
    Ji, Ying
    Xu, Yuanyuan
    Xie, Ming
    Han, Hao
    OPTICS AND LASERS IN ENGINEERING, 2018, 106 : 39 - 46
  • [27] Dual-wavelength spiral interferometry
    Tokizane, Yu
    Takashima, Ayato
    Hase, Eiji
    Yasui, Takeshi
    OPTICS LETTERS, 2024, 49 (12) : 3516 - 3519
  • [28] DUAL-WAVELENGTH (GAAL) AS LASER
    BOUADMA, N
    BOULEY, JC
    RIOU, J
    ELECTRONICS LETTERS, 1982, 18 (20) : 871 - 873
  • [29] Wavelength calibration with dual constraints for dual-wavelength interference microscope
    Liu Q.
    Huang X.-J.
    Li L.-L.
    Zhang H.
    Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2021, 29 (04): : 656 - 664
  • [30] DUAL-WAVELENGTH LASER ANNEALING
    AUSTON, DH
    VENKATESAN, TNC
    GOLOVCHENKO, JA
    APPLIED PHYSICS LETTERS, 1979, 34 (09) : 558 - 560
12345