Wavelength calibration with dual constraints for dual-wavelength interference microscope

被引：0
|
作者：
Liu, Qian [1 ]
Huang, Xiao-Jin [1 ]
Li, Lu-Lu [1 ]
Zhang, Hui [1 ]
机构：
[1] Institute of Machinery Manufacturing Technology, China Academy of Engineering Physics, Mianyang,621999, China
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2021年 / 29卷 / 04期
关键词：
9;
D O I：
10.37188/OPE.20212904.0656
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：656 / 664
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