共 50 条
- [41] Micromachining of photonic devices by femtosecond laser pulses JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS, 2009, 11 (01):
- [46] Effect of laser parameters in the micromachining of silicon by femtosecond pulse laser PROGRESS OF PRECISION ENGINEERING AND NANO TECHNOLOGY, 2007, 339 : 136 - +
- [47] Micro- and sub-micromachining of type IIa single crystal diamond using a Ti:Sapphire femtosecond laser JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME, 2002, 124 (02): : 389 - 396
- [48] Femtosecond Laser Micromachining of the Mask for Acoustofluidic Device Preparation ACS OMEGA, 2023, : 7838 - 7844