Research on the mechanism of micromachining of CVD diamond by femtosecond laser

被引：37
|
作者：
Sun, Yu [1 ,2 ]
Dou, Jian [1 ,2 ]
Xu, Muxun [1 ,2 ]
Cui, Jianlei [1 ,2 ,3 ]
Mei, Xuesong [1 ,2 ]
Wang, Wenjun [1 ,2 ]
Gao, Meng [1 ,2 ]
机构：
[1] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian, Shaanxi, Peoples R China
[2] Xi An Jiao Tong Univ, Shaanxi Key Lab Intelligent Robots, Xian, Shaanxi, Peoples R China
[3] Chinese Acad Sci, State Key Lab Transient Opt & Photon, Xian Inst Opt & Precis Mech, Xian, Shaanxi, Peoples R China
来源：
FERROELECTRICS | 2019年 / 549卷 / 01期
基金：
中国国家自然科学基金;
关键词：
Femtosecond laser; CVD diamond; ablation; XPS; graphitization; FIELD ENHANCEMENT; SURFACE;
D O I：
10.1080/00150193.2019.1592569
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Diamond is an excellent material in terms of hardness, thermal conductivity and chemical stability. In order to broaden its application area, the interaction mechanism of CVD diamond processed by femtosecond laser is analyzed based on laser micromachining technology. Through the threshold theory, the ablation threshold of CVD diamond is calculated. At the same time, the graphitization phase transition occurred in the diamond. The internal elements before and after the ablation of diamond by femtosecond laser are characterized by X-ray energy spectrum analysis. The changes of element content and bonding form are analyzed, and the relevant graphitization mechanism is revealed.
引用
收藏
页码：266 / 275
页数：10
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