Optimal Method for Correct Measurement of Line-edge roughness

This paper present a method to measure Line-edge Roughness in Scanning Electron Microscope images with high accuracy based on the digital image processing. As lithography source will be changed from ArF to Extreme UltraViolet (EUV), this trend increases the importance and difficulty of measuring LER. To measure LER accurately, we use two method; image filtering and Curve-fitting. Every digital image is degraded by several noises, so image filtering removes the specific noise and makes edge point of the image clear. Curve=-fitting reduces the quantization error. By combining these two method, proposed algorithm can get high accuracy than existing other methods.