Effect of anneling on ferroelectric properties of Bi3.25La0.75Ti3O12 thin films prepared by the sol-gel method

被引:0
|
作者
Guo, DY [1 ]
Wang, YB [1 ]
Yu, J [1 ]
Gao, JX [1 ]
机构
[1] Huazhong Univ Sci & Technol, Dept Elect Sci & Technol, Wuhan 430074, Peoples R China
关键词
Bi3.25La0.75Ti3O12; ferroelectric thin film; sol-gel method; leakage current;
D O I
暂无
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Bi3.25La0.75Ti3O12(BLT) thin films were prepared on Pt/Ti/SO2/Si substrate by the sol-gel method. The effect of annealing on their structures and ferroelectric properties was investigated. The XRD patterns indicate that the BLT films annealed at different temperatures are randomly orientated awl the single perovskite phase is obtained at 550 degrees C. The remnant polarization increases and the coercive field decreases with the annealing temperature increasing. The leakage current density of the BLT films annealed at 700 V is about 5.8 x 10(-8) A/cm(2) at the electric field of 250 kV/cm.
引用
收藏
页码:20 / 21
页数:2
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