Field-effect transistor based on β-SiC nanowire

beta-SiC nanowires were synthesized by the way of high-frequency induction with diameter range between 10 to 25 nm and the length was up to 10 mu m. Field-effect transistor was fabricated with those synthesized beta-SiC nanowires. The carrier mobilities of the n-type SiCFETs were 6.4 and 15.9 cm(2)/V(.)s when V-ds is 0.01 and 0.05 V at room temperature, respectively. At high temperature, the drain current increased by one order of magnitude than it did at room temperature. The carrier mobility, versus 1000/T agreed well with the Arrhenius function. The SiCFETs in this letter would be used as electrical devices operated in high temperatures because of their superior properties.