Very thin film crystalline silicon solar cells on glass substrate fabricated at low temperature

被引:69
|
作者
Yamamoto, K [1 ]
机构
[1] Kaneka Corp, Cent Res Labs, Kobe, Hyogo 652, Japan
关键词
optical scattering; photovoltaic cell measurements; p-i-n photodiodes; plasma CVD; thin films; silicon;
D O I
10.1109/16.791994
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The performances of thin-film poly-Si solar cells with a thickness of less than 5 mu m on a glass substrate have been investigated. The cell of glass/back reflector/n-i-p-type Si/ITO is well characterized by the structure of naturally surface texture and enhanced absorption with a back reflector (STAR), where the active i-type poly-Si layer was fabricated by plasma chemical vapor deposition (CVD) at low temperature. The cell with a thickness of 2.0 mu m demonstrated an intrinsic efficiency of 10.7% (aperture 10.1%), the open-circuit voltage of 0.539 V and the short current density of 25.8 mA/cm(2) as independently confirmed ba Japan Quality Assurance, which shows the no clear light-induced degradation. The optical and transport properties of poly-Si cells are summarized.
引用
收藏
页码:2041 / 2047
页数:7
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