Impurity Measurements in Polycrystalline Materials with Atom Probe Tomography

被引:0
|
作者
Ronsheim, P. [1 ]
Hatzistergos, M. [1 ]
Flaitz, P. [1 ]
机构
[1] IBM Microelect, Hopewell Jct, NY 12533 USA
关键词
D O I
10.1017/S1431927609097621
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
[No abstract available]
引用
收藏
页码:276 / 277
页数:2
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