Review of Atom Probe Tomography Applications for Semiconductor materials

被引：0
|
作者：
Renaud, L. [1 ]
Martin, I. [1 ]
Salle, B. [1 ]
Benbalagh, R. [1 ]
Davis, A. [2 ]
Schuhmacher, M. [1 ]
机构：
[1] CAMECA, F-92622 Gennevilliers, France
[2] CAMECA Inc, Nampa, ID 83687 USA
来源：
MICROSCOPY AND MICROANALYSIS | 2009年 / 15卷
关键词：
D O I：
10.1017/S1431927609094343
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：262 / 262
页数：1
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