Stress-Dependent Performance Optimization of Reconfigurable Silicon Nanowire Transistors

被引:16
|
作者
Baldauf, Tim [1 ]
Heinzig, Andre [1 ]
Trommer, Jens [2 ]
Mikolajick, Thomas [1 ,2 ]
Weber, Walter Michael [1 ,2 ]
机构
[1] Tech Univ Dresden, Ctr Adv Elect Dresden, D-01069 Dresden, Germany
[2] Nanoelect Mat Lab gGmbH, D-01187 Dresden, Germany
关键词
Silicon nanowire; reconfigurable logic; CMOS; RFET; SBFET; tunneling; Schottky junction; stress; strain; deformation potential; self-limited oxidation; simulation; TCAD;
D O I
10.1109/LED.2015.2471103
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Mechanical stress is an efficient but rather unexplored performance booster for diverse emerging research devices based on tunneling phenomena, such as tunnel field-effect transistors (TFETs), resonant TFETs, and reconfigurable FETs. In this letter, stress profiles formed by self-limited oxidation of intrinsic silicon nanowires are applied exemplarily on device simulations of reconfigurable silicon nanowire transistor based on two independently gated Schottky junctions. The deformation potential theory and the multi-valley band structure are applied for modeling of stress-dependent Schottky barriers. Strained n- and p-type transistors are analyzed with respect to transfer the characteristic and the influence of each strain direction. It has been verified that mechanical stress is an effective option to control current injection through the Schottky junctions and thus to achieve symmetric performance of reconfigurable nanowire devices.
引用
收藏
页码:991 / 993
页数:3
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