Study of the heavily p-type doping of cubic GaN with Mg

被引:34
|
作者
Hernandez-Gutierrez, C. A. [1 ]
Casallas-Moreno, Y. L. [2 ]
Rangel-Kuoppa, Victor-Tapio [3 ]
Cardona, Dagoberto [4 ]
Hu, Yaoqiao [5 ]
Kudriatsev, Yuri [6 ]
Zambrano-Serrano, M. A. [7 ]
Gallardo-Hernandez, S. [8 ]
Lopez-Lopez, M. [8 ]
机构
[1] Tecnol Nacl Mexico Inst Tecnol Tuxtla Gutierrez, Posgrad Ingn Grp Optomecatron, Carretera Panamer Km 1080, Tuxtla Gutierrez 29050, Mexico
[2] Inst Politecn Nacl UPIITA, CONACYT, Ave IPN 2580 Col Barrio La Laguna Ticoman, Mexico City 07340, DF, Mexico
[3] Univ Autonoma Puebla, Ctr Invest Disposit Semicond, Inst Ciencias, Puebla 72000, Mexico
[4] UMSNH, Fac Ciencias Fis Matemat, Edificio L,Francisco J Mujica S-N, Morelia 58000, Michoacan, Mexico
[5] Univ Texas Dallas, Dept Mat Sci & Engn, Richardson, TX 75080 USA
[6] Cinvestav IPN, Dept Ingn Elect SEES, Mexico City 07360, DF, Mexico
[7] Cinvestav IPN, Programa Doctorado Nanociencias & Nanotecnol, Mexico City 07360, DF, Mexico
[8] Cinvestav IPN, Dept Fis, Mexico City 07360, DF, Mexico
关键词
GALLIUM NITRIDE; ULTRASOFT PSEUDOPOTENTIALS; OPTICAL-PROPERTIES; GAAS; GROWTH; ELECTROLUMINESCENCE; PHOTOLUMINESCENCE; DEFECTS;
D O I
10.1038/s41598-020-73872-w
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
We have studied the Mg doping of cubic GaN grown by plasma-assisted Molecular Beam Epitaxy (PA-MBE) over GaAs (001) substrates. In particular, we concentrated on conditions to obtain heavy p-type doping to achieve low resistance films which can be used in bipolar devices. We simulated the Mg-doped GaN transport properties by density functional theory (DFT) to compare with the experimental data. Mg-doped GaN cubic epitaxial layers grown under optimized conditions show a free hole carrier concentration with a maximum value of 6x10(19) cm(-3) and mobility of 3 cm(2)/Vs. Deep level transient spectroscopy shows the presence of a trap with an activation energy of 114 meV presumably associated with nitrogen vacancies, which could be the cause for the observed self-compensation behavior in heavily Mg-doped GaN involving Mg-V-N complexes. Furthermore, valence band analysis by X-ray photoelectron spectroscopy and photoluminescence spectroscopy revealed an Mg ionization energy of about 100 meV, which agrees quite well with the value of 99.6 meV obtained by DFT. Our results show that the cubic phase is a suitable alternative to generate a high free hole carrier concentration for GaN.
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页数:7
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