Ion implanted substrates for SAW gas sensors

被引：0
|
作者：
Pasternak, M [1 ]
Jasek, K
机构：
[1] Mil Univ Technol, Inst Radioelect, PL-00490 Warsaw, Poland
[2] Mil Univ Technol, Inst Chem, PL-00490 Warsaw, Poland
来源：
JOURNAL DE PHYSIQUE IV | 2005年 / 129卷
关键词：
D O I：
10.1051/jp4:2005129031
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
An approach to fundamental properties analysis of high frequency surface acoustic wave (SAW) gas sensors basing on an ion implanted substrate has been described in the paper. The results of analytical calculation shows a practical significance of the composite for high frequency SAW sensors technology.
引用
收藏
页码：147 / 150
页数：4
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