Ion implanted substrates for SAW gas sensors

被引：0
|
作者：
Pasternak, M [1 ]
Jasek, K
机构：
[1] Mil Univ Technol, Inst Radioelect, PL-00490 Warsaw, Poland
[2] Mil Univ Technol, Inst Chem, PL-00490 Warsaw, Poland
来源：
JOURNAL DE PHYSIQUE IV | 2005年 / 129卷
关键词：
D O I：
10.1051/jp4:2005129031
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
An approach to fundamental properties analysis of high frequency surface acoustic wave (SAW) gas sensors basing on an ion implanted substrate has been described in the paper. The results of analytical calculation shows a practical significance of the composite for high frequency SAW sensors technology.
引用
收藏
页码：147 / 150
页数：4
相关论文
共 50 条
  • [21] SAW Gas Sensors with Metal Oxides Nanoplatelets Layers
    Penza, M.
    Sadek, A. Z.
    Aversa, P.
    McCulloch, D. G.
    Wlodarski, W.
    Kalantar-Zadeh, K.
    [J]. SENSOR LETTERS, 2011, 9 (02) : 920 - 924
  • [22] Semiconductor Sensor Layer in SAW Gas Sensors Configuration
    Hejczyk, T.
    Urbanczyk, M.
    Jakubik, W. P.
    [J]. ACTA PHYSICA POLONICA A, 2010, 118 (06) : 1153 - 1157
  • [23] A room temperature SAW based methane gas sensors
    Wang, Wen
    Hu, Haoliang
    He, Shitang
    Pan, Yong
    Zhang, Caihong
    Dong, Chuang
    [J]. 2013 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2013, : 2148 - 2150
  • [24] Theoretical analysis of acoustoelectrical sensitivity in SAW gas sensors
    Jakubik, W.
    Powroznik, P.
    Wrotniak, J.
    Krzywiecki, M.
    Hejczyk, T.
    [J]. EUROSENSORS 2015, 2015, 120 : 1261 - 1264
  • [25] Gas sensors based on SAW narrow aperture devices
    Gulyaev, YV
    Kryshtal, RG
    Medved, AV
    Shemet, VV
    Zemlyakov, VE
    [J]. 2000 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2000, : 441 - 444
  • [26] Temperature and strain SAW/BAW sensors on metallic substrates with RFID capability
    Mengue, Prince
    Paulmier, Baptiste
    Hage-Ali, Sami
    Noirel, Cyril
    Poncot, Marc
    Floer, Cecile
    M'Jahed, Hamid
    Shvetsov, Alexander
    Zhgoon, Sergei
    Nicolay, Pascal
    Elmazria, Omar
    [J]. SMART MATERIALS AND STRUCTURES, 2023, 32 (09)
  • [27] Investigations on the swift heavy ion implanted GaAs substrates
    Jayavel, P
    Arulchakkaravarthi, A
    Ramasamy, P
    Kumar, J
    [J]. VACUUM, 2002, 68 (04) : 291 - 296
  • [28] ENCAPSULATED ANNEALING OF ION-IMPLANTED GAAS SUBSTRATES
    VALCO, GJ
    KAPOOR, VJ
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (08) : C319 - C319
  • [29] Ion implanted MXene electrodes for selective VOC sensors
    Obrebowski, Szymon
    Cwik, Kamila
    Srivatsa, Shreyas
    Uhl, Tadeusz
    Jagielski, Jacek
    Wolska, Anna
    Klepka, Marcin
    Khosravizadeh, Zeinab
    Jakiela, Rafal
    Trzyna-Sowa, Malgorzata
    Wojciechowski, Tomasz
    Szwacki, Nevill Gonzalez
    Marynowski, Wojciech
    Lewinski, Janusz
    Zybala, Rafal
    Borysiewicz, Michal A.
    [J]. APPLIED MATERIALS TODAY, 2024, 39
  • [30] Polyaniline thin films as a toxic gas sensors in SAW system
    Jakubik, WP
    Urbanczyk, M
    Maciak, E
    Pustelny, T
    Stolarczyk, A
    [J]. JOURNAL DE PHYSIQUE IV, 2005, 129 : 121 - 124
12345