A Study on Gas Sensors Using a SAW Device

被引：0

作者：

Sugiyama, Katutoshi ^{[1
]}

Saeki, Katsutoshi ^{[2
]}

Nihon, Minoru Saito ^{[3
]}

Sekine, Yoshifumi ^{[4
]}

机构：

[1] Nihon Univ, Grad Sch Sci & Technol, Funabashi, Chiba, Japan

[2] Nihon Univ, Coll Sci & Technol, Funabashi, Chiba, Japan

[3] Nihon Univ, Coll Humanities & Sci, Funabash, Japan

[4] Nihon Univ, Coll Sci & Technol, Funabash, Japan

来源：

2014 IEEE ASIA PACIFIC CONFERENCE ON CIRCUITS AND SYSTEMS (APCCAS) | 2014年

关键词：

SAWSensor; Copper Phthalocyanine Zinc Phthalocyanine; NO2; SO2;

D O I：

暂无

中图分类号：

TP301 [理论、方法];

学科分类号：

081202 ;

摘要：

When an open type stove is used indoors, NO2 is generated by the combustion of the fuel, which can lead to respiratory diseases or allergic reactions. In addition, SO2 is also generated by the combustion of fossil fuels, which can cause asthma and bronchitis. In this paper, we propose a sensor, which uses a SAW device coated with Cu and Zn phthalocyanine films, for measuring the concentrations of NO2 and SO2. We have demonstrated that NO2 and SO2 concentrations in the 0.3-0.5 ppm range can be measured in a mixed gas containing a NO2 and SO2 by using sensors coated with 400 nm thick Cu phthalocyanine and 50 nm thick Zn phthalocyanine films, respectively. Furthermore, a multi sensor incorporating patterned Zn and Cu phthalocyanine films, capable of measuring the concentrations of both NO2 and SO2 has been demonstrated.

引用

页码：459 / 462

页数：4

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