Distorted surface topography observed by atomic force microscopy

被引:4
|
作者
Li, LA
Liu, RP [1 ]
Xu, Z
Xu, Y
Wang, WK
Fan, CZ
机构
[1] Yanshan Univ, Key Lab Metastable Mat Sci & Technol, Qinhuangdao, Peoples R China
[2] Chinese Acad Sci, Inst Phys, Beijing 100080, Peoples R China
基金
中国国家自然科学基金;
关键词
AFM; Au film; image distortion;
D O I
10.1016/j.measurement.2005.10.005
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Topography of Au thin films deposited by magnetron sputtering technique on a silicon substrate was studied by atomic force microscopy (AFM). Distortion of the surface morphologies as a result of interaction between the film and the probe tip was observed. Some topographical morphologies that look like perfect were distorted, Thus, the reality of the topography by AFM, in some cases, needs to be re-evaluated. (C) 2005 Elsevier Ltd. All rights reserved.
引用
收藏
页码:12 / 15
页数:4
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