Improving Accuracy of Sample Surface Topography by Atomic Force Microscopy

被引：6

作者：

Xu, Mingsheng ^{[1
]}

Fujita, Daisuke ^{[2
,3
]}

Onishi, Keiko ^{[2
]}

Miyazawa, Kunichi ^{[4
]}

机构：

[1] Natl Inst Mat Sci, Int Ctr Young Scientists Sengen, Tsukuba, Ibaraki 3050037, Japan

[2] Natl Inst Mat Sci, Adv Nano Characterizat Ctr, Tsukuba, Ibaraki 3050037, Japan

[3] Natl Inst Mat Sci, Int Ctr Mat Nanoarchitecton, Tsukuba, Ibaraki 3050037, Japan

[4] Natl Inst Mat Sci, Adv Nanomat Lab, Tsukuba, Ibaraki 3050037, Japan

来源：

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | 2009年 / 9卷 / 10期

基金：

日本科学技术振兴机构;

关键词：

Atomic Force Microscopy; Tip Shape; Image Reconstruction; Fullerene Nanowhiskers; INTERFACIAL PRECIPITATION METHOD; C-60; NANOTUBES; RECONSTRUCTION; IMAGES;

D O I：

10.1166/jnn.2009.1232

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We describe method for improving the accuracy of sample surface topography by atomic force microscopy (AFM). It takes into account the effect of the AFM tip shape and image reconstruction on the acquired AFM images. The dilation effect due to the use of a finite-sized tip shape can be minimized by using a sharp AFM tip and scanning at the most symmetric direction of tip geometry. Reconstruction of AFM image could produce more accurate sample surface features. The method is useful to AFM measurement and is significant because AFM has become a fundamental tool in nanoscience and nanotechnology with multiple applications in a wide range of disciplines ranging from biology to physics and material science.

引用

页码：6003 / 6007

页数：5

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