Thermal Conductivity of Polycrystalline CVD Diamond: Experiment and Theory

被引:13
|
作者
Inyushkin, A. V. [1 ]
Taldenkov, A. N. [1 ]
Ral'chenko, V. G. [2 ]
Konov, V. I. [2 ]
Khomich, A. V. [3 ]
Khmel'nitskii, R. A. [4 ]
机构
[1] IV Kurchatov Atom Energy Inst, Russian Res Ctr, Moscow 123182, Russia
[2] Russian Acad Sci, Prokhorov Gen Phys Inst, Moscow 119991, Russia
[3] Russian Acad Sci, Inst Radio Engn & Elect, Fryazino Branch, Fryazino 141190, Moscow Oblast, Russia
[4] Russian Acad Sci, PN Lebedev Phys Inst, Moscow 119991, Russia
基金
俄罗斯基础研究基金会;
关键词
D O I
10.1134/S1063776108090136
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The temperature dependences of thermal conductivity kappa of polycrystalline CVD diamond are measured in the temperature range from 5 to 410 K. The diamond sample is annealed at temperatures sequentially increasing from 1550 to 1690 degrees C to modify the properties of the intercrystallite contacts in it. As a result of annealing, the thermal conductivity decreases strongly at temperatures below 45 K, and its temperature dependence changes from approximately quadratic to cubic. At T > 45 K, the thermal conductivity remains almost unchanged upon annealing at temperatures up to 1650 degrees C and decreases substantially at higher annealing temperatures. The experimental data are analyzed in terms of the Callaway theory of thermal conductivity [9], which takes into account the specific role of normal phonon-phonon scattering processes. The thermal conductivity is calculated with allowance for three-phonon scattering processes, the diffuse scattering by sample boundaries, the scattering by point and extended defects, the specular scattering by crystallite boundaries, and the scattering by intercrystallite contacts. A model that reproduces the main specific features of the thermal conductivity of CVD diamond is proposed. The phonon scattering by intercrystallite contacts plays a key role in this model.
引用
收藏
页码:462 / 472
页数:11
相关论文
共 50 条
  • [41] Report on a second round robin measurement of the thermal conductivity of CVD diamond
    Graebner, JE
    Altmann, H
    Balzaretti, NM
    Campbell, R
    Chae, HB
    Degiovanni, A
    Enck, R
    Feldman, A
    Fournier, D
    Fricke, J
    Goela, JS
    Gray, KJ
    Gu, YQ
    Hatta, I
    Hartnett, TM
    Imhof, RE
    Kato, R
    Koidl, P
    Kuo, PK
    Lee, TK
    Maillet, D
    Remy, B
    Roger, JP
    Seong, DJ
    Tye, RP
    Verhoeven, H
    Wörner, E
    Yehoda, JE
    Zachai, R
    Zhang, B
    DIAMOND AND RELATED MATERIALS, 1998, 7 (11-12) : 1589 - 1604
  • [42] Thermal conductivity of CVD-diamond film studied by photoacoustic spectroscopy
    Takabatake, N
    Kobayashi, T
    Ito, H
    Izumi, T
    NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY, 1999, 9 (02): : 134 - 136
  • [43] THERMAL-CONDUCTIVITY OF DIAMOND FILMS SYNTHESIZED BY MICROWAVE PLASMA CVD
    ONO, A
    BABA, T
    FUNAMOTO, H
    NISHIKAWA, A
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (10): : L808 - L810
  • [44] INVESTIGATION OF THE HETEROGENEOUS THERMAL CONDUCTIVITY IN BULK CVD DIAMOND FOR USE IN ELECTRONICS THERMAL MANAGEMENT
    Yates, Luke
    Cheaito, Ramez
    Sood, Aditya
    Cheng, Zhe
    Bougher, Thomas
    Asheghi, Mehdi
    Goodson, Kenneth
    Goorsky, Mark
    Faili, Firooz
    Twitchen, Dan
    Graham, Samuel
    PROCEEDINGS OF THE ASME INTERNATIONAL TECHNICAL CONFERENCE AND EXHIBITION ON PACKAGING AND INTEGRATION OF ELECTRONIC AND PHOTONIC MICROSYSTEMS, 2017, 2017,
  • [45] Thermal conductivity measurement of CVD diamond films using a modified thermal comparator method
    Cheruparambil, KR
    Farouk, B
    Yehoda, JE
    Macken, NA
    JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME, 2000, 122 (04): : 808 - 816
  • [46] Determination of the thermal conductivity of polycrystalline diamond films by means of the photoacoustic effect
    A. N. Obraztsov
    I. Yu. Pavlovskii
    V. G. Ral’chenko
    H. Okushi
    H. Watanabe
    Technical Physics, 1999, 44 : 438 - 442
  • [47] INFLUENCE OF HYDROGENATED DEFECTS AND VOIDS ON THE THERMAL-CONDUCTIVITY OF POLYCRYSTALLINE DIAMOND
    RUTLEDGE, KMM
    SCRUGGS, BE
    GLEASON, KK
    JOURNAL OF APPLIED PHYSICS, 1995, 77 (04) : 1459 - 1462
  • [48] Determination of the thermal conductivity of polycrystalline diamond films by means of the photoacoustic effect
    Obraztsov, AN
    Pavlovski, IY
    Ral'chenko, VG
    Okushi, H
    Watanabe, H
    TECHNICAL PHYSICS, 1999, 44 (04) : 438 - 442
  • [49] Diamond MISFETs fabricated on high quality polycrystalline CVD diamond
    Hirama, K.
    Takayanagi, H.
    Yamauchi, S.
    Jingu, Y.
    Umezawa, H.
    Kawarada, H.
    PROCEEDINGS OF THE 19TH INTERNATIONAL SYMPOSIUM ON POWER SEMICONDUCTOR DEVICES AND ICS, 2007, : 269 - +
  • [50] Simultaneous determination of the lattice thermal conductivity and grain/grain thermal resistance in polycrystalline diamond
    Anaya, J.
    Bai, T.
    Wang, Y.
    Li, C.
    Goorsky, M.
    Bougher, T. L.
    Yates, L.
    Cheng, Z.
    Graham, C. S.
    Hobart, K. D.
    Feygelson, T. I.
    Tadjer, M. J.
    Anderson, T. J.
    Pate, B. B.
    Kuball, M.
    ACTA MATERIALIA, 2017, 139 : 215 - 225