Determination of the thermal conductivity of polycrystalline diamond films by means of the photoacoustic effect

被引：0
|
作者：
A. N. Obraztsov
I. Yu. Pavlovskii
V. G. Ral’chenko
H. Okushi
H. Watanabe
机构：
[1] M. V. Lomonosov State University,Institute of General Physics
[2] Russian Academy of Sciences,undefined
[3] Electrotechnical Laboratory,undefined
来源：
Technical Physics | 1999年 / 44卷
关键词：
Silicon; Microwave; Thermal Conductivity; Chemical Vapor Deposition; Vapor Deposition;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A new method of determining the heat-conducting properties of diamond films is proposed, based on the photoacoustic effect. This method is used to study diamond polycrystalline films grown on silicon by chemical vapor deposition in a microwave discharge plasma. The thermal conductivity obtained was approximately half that for single-crystal diamond.
引用
收藏
页码：438 / 442
页数：4
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