Determination of the thermal conductivity of polycrystalline diamond films by means of the photoacoustic effect

被引：1
|
作者：
Obraztsov, AN [1 ]
Pavlovski, IY
Ral'chenko, VG
Okushi, H
Watanabe, H
机构：
[1] Moscow MV Lomonosov State Univ, Moscow 119899, Russia
[2] Russian Acad Sci, Inst Gen Phys, Moscow 117942, Russia
[3] Electrotech Lab, Tsukuba, Ibaraki 305, Japan
来源：
TECHNICAL PHYSICS | 1999年 / 44卷 / 04期
关键词：
D O I：
10.1134/1.1259316
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A new method of determining the heat-conducting properties of diamond films is proposed, based on the photoacoustic effect. This method is used to study diamond polycrystalline films grown on silicon by chemical vapor deposition in a microwave discharge plasma. The thermal conductivity obtained was approximately half that for single-crystal diamond. (C) 1999 American Institute of Physics. [S1063-7842(99)01704-3].
引用
收藏
页码：438 / 442
页数：5
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