共 50 条
- [31] Synchrotron light as a source for extreme ultraviolet lithographyJ Vac Sci Technol B Microelectron Nanometer Struct, (3043-3046):
- [32] Synchrotron light as a source for extreme ultraviolet lithographyJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (06): : 3043 - 3046Ockwell, DC论文数: 0 引用数: 0 h-index: 0机构: Oxford Instruments, Oxford OX2 0DX, England Oxford Instruments, Oxford OX2 0DX, EnglandCrosland, NCE论文数: 0 引用数: 0 h-index: 0机构: Oxford Instruments, Oxford OX2 0DX, England Oxford Instruments, Oxford OX2 0DX, EnglandKempson, VC论文数: 0 引用数: 0 h-index: 0机构: Oxford Instruments, Oxford OX2 0DX, England Oxford Instruments, Oxford OX2 0DX, England
- [33] FAST CONTINUUM LIGHT SOURCE FOR EXTREME ULTRAVIOLETREVIEW OF SCIENTIFIC INSTRUMENTS, 1971, 42 (01): : 171 - &CARLSON, RW论文数: 0 引用数: 0 h-index: 0
- [34] Dalian Extreme Ultraviolet Coherent Light SourceCHINESE JOURNAL OF LASERS-ZHONGGUO JIGUANG, 2019, 46 (01):Yu Yong论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R China Univ Chinese Acad Sci, Beijing 100049, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaLi Qinming论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R China Univ Chinese Acad Sci, Beijing 100049, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaYang Jiayue论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaWang Guanglei论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaShi Lei论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaDing Hongli论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaTao Kai论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaTang Zhenxing论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaHe Zhigang论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaChen Zhichao论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaTian Yuhuan论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaDai Dongxu论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaWu Guorong论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaZhang Weiqing论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaYang Xueming论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaFeng Chao论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaChen Si论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaWang Zhen论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaGu Duan论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaChen Jie论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaLiu Xiaoqing论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaLan Taihe论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaFeng Lie论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaZhang Wenyan论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaZhong Shaopeng论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaZhang Junqiang论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaLi Lin论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaXiao Chengcheng论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaLi Hao论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaZhao Huan论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaChen Guanghua论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaZhu Haijun论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaDing Jianguo论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaHuang Maomao论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaZhang Wei论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaLai Longwei论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaYang Fubin论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaWang Guanghong论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaXiang Shengwang论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaHu Xiao论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaLiu Yiyong论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaSun Sen论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaGao Fei论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaJiang Zhiqiang论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaZhou Xiaoxuan论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaLiu Yongfang论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaWu Yonghua论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaChen Zhihao论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaWang Ruiping论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R ChinaHuang Dazhang论文数: 0 引用数: 0 h-index: 0机构: Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai 201204, Peoples R China Chinese Acad Sci, Dalian Inst Chem Phys, State Key Lab Mol React Dynam, Dalian 116023, Liaoning, Peoples R China
- [35] Thomson scattering calibration with ultrabright supercontinuum light sourceREVIEW OF SCIENTIFIC INSTRUMENTS, 2006, 77 (10):Pasqualotto, R.论文数: 0 引用数: 0 h-index: 0机构: EURATOM, Enea Fus, Consorzio RFX, I-35127 Padua, ItalyAlfier, A.论文数: 0 引用数: 0 h-index: 0机构: EURATOM, Enea Fus, Consorzio RFX, I-35127 Padua, Italy
- [36] Spatially resolved Thomson scattering measurements of the transition from the collective to the non-collective regime in a laser-produced plasmaREVIEW OF SCIENTIFIC INSTRUMENTS, 2016, 87 (11):Schaeffer, D. B.论文数: 0 引用数: 0 h-index: 0机构: Univ Calif Los Angeles, Dept Phys & Astron, Los Angeles, CA 90095 USA Univ Calif Los Angeles, Dept Phys & Astron, Los Angeles, CA 90095 USAConstantin, C. G.论文数: 0 引用数: 0 h-index: 0机构: Univ Calif Los Angeles, Dept Phys & Astron, Los Angeles, CA 90095 USA Univ Calif Los Angeles, Dept Phys & Astron, Los Angeles, CA 90095 USABondarenko, A. S.论文数: 0 引用数: 0 h-index: 0机构: Univ Calif Los Angeles, Dept Phys & Astron, Los Angeles, CA 90095 USA Univ Calif Los Angeles, Dept Phys & Astron, Los Angeles, CA 90095 USAEverson, E. T.论文数: 0 引用数: 0 h-index: 0机构: Univ Calif Los Angeles, Dept Phys & Astron, Los Angeles, CA 90095 USA Univ Calif Los Angeles, Dept Phys & Astron, Los Angeles, CA 90095 USANiemann, C.论文数: 0 引用数: 0 h-index: 0机构: Univ Calif Los Angeles, Dept Phys & Astron, Los Angeles, CA 90095 USA Univ Calif Los Angeles, Dept Phys & Astron, Los Angeles, CA 90095 USA
- [37] Extreme ultraviolet plasma source for future lithographyIEEE TRANSACTIONS ON PLASMA SCIENCE, 2008, 36 (04) : 1280 - 1281Wagenaars, Erik论文数: 0 引用数: 0 h-index: 0机构: Univ Aachen, Rhein Westfal TH Aachen, Chair Laser Technol, D-52074 Aachen, Germany Univ Aachen, Rhein Westfal TH Aachen, Chair Laser Technol, D-52074 Aachen, GermanyMader, Arnaud论文数: 0 引用数: 0 h-index: 0机构: Philips Extreme UV GmbH, D-52074 Aachen, Germany Univ Aachen, Rhein Westfal TH Aachen, Chair Laser Technol, D-52074 Aachen, Germany论文数: 引用数: h-index:机构:Jonkers, Jeroen论文数: 0 引用数: 0 h-index: 0机构: Philips Extreme UV GmbH, D-52074 Aachen, Germany Univ Aachen, Rhein Westfal TH Aachen, Chair Laser Technol, D-52074 Aachen, GermanyNeff, Willi论文数: 0 引用数: 0 h-index: 0机构: Fraunhofer Inst Laser Tech, D-52074 Aachen, Germany Univ Aachen, Rhein Westfal TH Aachen, Chair Laser Technol, D-52074 Aachen, Germany
- [38] THOMSON SCATTERING MEASUREMENTS OF OHMICALLY HEATED TARGET PLASMABULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1974, 19 (04): : 482 - 482ANDERSON, OA论文数: 0 引用数: 0 h-index: 0机构: LAWRENCE LIVERMORE LAB,LIVERMORE,CA LAWRENCE LIVERMORE LAB,LIVERMORE,CA
- [39] COLLECTIVE SCATTERING OF LASER LIGHT BY A PLASMAPHYSICAL REVIEW LETTERS, 1966, 16 (04) : 122 - &CHAN, PW论文数: 0 引用数: 0 h-index: 0NODWELL, RA论文数: 0 引用数: 0 h-index: 0
- [40] Implementation of collective Thomson scattering on the TEXTOR tokamak for energetic ion measurementsREVIEW OF SCIENTIFIC INSTRUMENTS, 2001, 72 (01): : 1148 - 1150Porte, L论文数: 0 引用数: 0 h-index: 0机构: MIT, Plasma Sci & Fus Ctr, Cambridge, MA 02139 USABindslev, H论文数: 0 引用数: 0 h-index: 0机构: MIT, Plasma Sci & Fus Ctr, Cambridge, MA 02139 USAHoekzema, F论文数: 0 引用数: 0 h-index: 0机构: MIT, Plasma Sci & Fus Ctr, Cambridge, MA 02139 USAMachuzak, J论文数: 0 引用数: 0 h-index: 0机构: MIT, Plasma Sci & Fus Ctr, Cambridge, MA 02139 USAWoskov, P论文数: 0 引用数: 0 h-index: 0机构: MIT, Plasma Sci & Fus Ctr, Cambridge, MA 02139 USAVan Eester, D论文数: 0 引用数: 0 h-index: 0机构: MIT, Plasma Sci & Fus Ctr, Cambridge, MA 02139 USA