Model of the Interaction of Reactive Gases with Polymer Materials in Low-Pressure Radio-Frequency Plasma

被引:1
|
作者
Timoshina, Y. A. [1 ]
Voznesensky, E. F. [1 ]
Teptina, A. I. [1 ]
Zhelonkin, Y. O. [2 ]
机构
[1] Kazan Natl Res Technol Univ, Kazan 420015, Russia
[2] Ferry Watt LLC, Kazan 420087, Russia
关键词
FORCE-FIELD; REAXFF;
D O I
10.1134/S0018143923070536
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The aim of this work is to scientifically substantiate the mechanisms of plasma-chemical modification of polymeric materials in radio-frequency (RF) low-pressure discharge plasma. Using the method of molecular dynamics, a model describing the mechanisms of formation of oxygen- and nitrogen-containing functional groups on the surface of polymeric materials as a result of plasma modification was developed. The established mechanisms include multistep chemical reactions with the formation of alkyl dioxyl and alkoxyl radicals and unstable hydroperoxide groups.
引用
收藏
页码:S234 / S237
页数:4
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