Model of the Interaction of Reactive Gases with Polymer Materials in Low-Pressure Radio-Frequency Plasma

被引：1
|
作者：
Timoshina, Y. A. [1 ]
Voznesensky, E. F. [1 ]
Teptina, A. I. [1 ]
Zhelonkin, Y. O. [2 ]
机构：
[1] Kazan Natl Res Technol Univ, Kazan 420015, Russia
[2] Ferry Watt LLC, Kazan 420087, Russia
来源：
HIGH ENERGY CHEMISTRY | 2023年 / 57卷 / SUPPL 1期
关键词：
FORCE-FIELD; REAXFF;
D O I：
10.1134/S0018143923070536
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
The aim of this work is to scientifically substantiate the mechanisms of plasma-chemical modification of polymeric materials in radio-frequency (RF) low-pressure discharge plasma. Using the method of molecular dynamics, a model describing the mechanisms of formation of oxygen- and nitrogen-containing functional groups on the surface of polymeric materials as a result of plasma modification was developed. The established mechanisms include multistep chemical reactions with the formation of alkyl dioxyl and alkoxyl radicals and unstable hydroperoxide groups.
引用
收藏
页码：S234 / S237
页数：4
相关论文
共 50 条
  • [41] Diagnostics of a Radio-Frequency Plasma Expanding Through a Nozzle (PETN) at Low Pressure
    R. Avni
    S. F. Miralaï
    F. Prevot
    D. Morvan
    J. Amoroux
    H. Nickel
    Plasma Chemistry and Plasma Processing, 1997, 17 : 467 - 478
  • [42] Diagnostics of a radio-frequency plasma expanding through a nozzle (PETN) at low pressure
    Avni, R
    Miralai, SF
    Prevot, F
    Morvan, D
    Amoroux, J
    Nickel, H
    PLASMA CHEMISTRY AND PLASMA PROCESSING, 1997, 17 (04) : 467 - 478
  • [43] LOW-PRESSURE ARC SPRAYING OF REACTIVE MATERIALS
    STEFFENS, HD
    ERTURK, E
    THIN SOLID FILMS, 1984, 121 (02) : 143 - 150
  • [44] Self-consistent kinetic modeling of low-pressure inductively coupled radio-frequency discharges
    Yang, Y
    Wu, HM
    JOURNAL OF APPLIED PHYSICS, 1996, 80 (07) : 3699 - 3704
  • [45] Destruction of methane in low-pressure, electrodeless radio frequency plasma on quartz walls
    Mozetic, Miran
    Vesel, Alenka
    Alegre, Daniel
    Tabares, Francisco L.
    JOURNAL OF APPLIED PHYSICS, 2011, 110 (05)
  • [46] Fast modeling of the low-pressure capacitively coupled radio-frequency discharge based on the nonlocal approach
    Berezhnoi, SV
    Kaganovich, ID
    Tsendin, LD
    Schweigert, VA
    APPLIED PHYSICS LETTERS, 1996, 69 (16) : 2341 - 2343
  • [47] Spectroscopic study and numerical simulation of low-pressure radio-frequency capacitive discharge with argon downstream
    Tanisli, Murat
    Rafatov, Ismail
    Sahin, Neslihan
    Mertadam, Sercan
    Demir, Suleyman
    CANADIAN JOURNAL OF PHYSICS, 2017, 95 (02) : 190 - 200
  • [48] Effect of dc bias control on the power absorption in low-pressure, radio-frequency capacitive sheaths
    Gahan, D.
    Soberon, F.
    JOURNAL OF APPLIED PHYSICS, 2007, 101 (02)
  • [49] Dynamical model of the radio-frequency plasma sheath
    Dai, ZL
    Wang, YN
    Ma, TC
    ACTA PHYSICA SINICA, 2001, 50 (12) : 2398 - 2402
  • [50] STUDY OF VOLUME AND SURFACE PROCESSES IN LOW-PRESSURE RADIO-FREQUENCY PLASMA REACTORS BY PULSED EXCITATION METHODS .1. HYDROGEN ARGON PLASMA
    BOUCHOULE, A
    RANSON, P
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (02): : 317 - 326
12345