RADIO-FREQUENCY PLASMA REACTOR FOR POLYMER SURFACE TREATMENT

被引：5
|
作者：
HOLLAHAN, JR
机构：
来源：
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1969年 / 2卷 / 02期
关键词：
D O I：
10.1088/0022-3735/2/2/423
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：203 / &
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