共 50 条
- [31] Oxidation and morphology change of Ru films caused by sputter deposition of Ta2O5 films JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (4A): : 1941 - 1942
- [32] Oxidation and morphology change of Ru films caused by sputter deposition of Ta2O5 films Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2005, 44 (4 A): : 1941 - 1942
- [36] Study of dry and electrogenerated Ta2O5 and Ta/Ta2O5/Pt structures by XPS MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1998, 55 (1-2): : 134 - 142
- [37] Effect of dissolved oxygen on thermal oxidation in Ta2O5/Ta sandwiches Journal of Electronic Materials, 1998, 27 : 1034 - 1037
- [40] (Ta2O5)0.92(TiO2)0.08 thin films prepared by pulsed laser deposition FOURTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS, 2000, 4086 : 679 - 682