GaN-Based Double-Heterojunction Bipolar Transistors With a Composition Graded p-InGaN Base

被引:2
|
作者
Yan, Shumeng [1 ,2 ]
Zhou, Yu [1 ,2 ,3 ,4 ]
Liu, Jianxun [1 ,2 ,3 ,4 ]
Zhong, Yaozong [1 ,2 ,3 ,4 ]
Sun, Xiujian [1 ,2 ]
Chen, Xin [1 ,2 ,3 ,4 ]
Guo, Xiaolu [1 ,2 ]
Li, Qian [1 ,2 ,3 ,4 ]
Sun, Qian [1 ,2 ,3 ,4 ]
Yang, Hui [1 ,2 ,3 ,4 ]
机构
[1] Univ Sci & Technol China, Sch Nano Technol & Nano Bion, Hefei 230026, Peoples R China
[2] Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Key Lab Nanodevices & Applicat, Suzhou 215123, Peoples R China
[3] Guangdong Inst Semicond Micronano Mfg Technol, Foshan 528000, Peoples R China
[4] Jiangxi Zhongke Roland Photoelect Co Ltd, Res & Dev Dept, Nanchang 330200, Peoples R China
基金
国家重点研发计划;
关键词
Double heterojunction bipolar transistors; Indium; Silicon; Sun; Piezoelectric polarization; Heterojunctions; Semiconductor process modeling; Band discontinuity; current gain; GaN-based double-heterojunction bipolar transistor (DHBT); graded base intercept voltage; piezoelectric polarization;
D O I
10.1109/TED.2023.3243585
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
influence of energy band structure on the electrical characteristics of GaN-based double-heterojunction bipolar transistors (DHBTs) has been stud-ied through both simulation and fabrication. According to the simulation result, a novel DHBT structure with a composition graded base was grown and fabricated. A long minority carrier lifetime of 4.08 ns has been achieved for the composition graded p-InGaN base with a greatly improved material quality. The indium composition grading of the p-InGaN base layer combined with Si doping profile tuning for the collector layer was proposed to eliminate the energy barrier usually formed at the conventional GaN/InGaN/GaN base-collector (B-C) junction interface due to the band discontinuity and polarization effect. As a result, the as-fabricated DHBT presents a high intercept voltage of 225 V extracted from the I-C-V-CE curves and a high current gain of 49.
引用
收藏
页码:1613 / 1621
页数:9
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