2D Short-Channel Tunneling Transistor Relying on Dual-Gate Modulation for Integrated Circuits Application
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作者:
Li, Ling
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South China Normal Univ, Sch Semicond Sci & Technol, Foshan 528225, Peoples R ChinaSouth China Normal Univ, Sch Semicond Sci & Technol, Foshan 528225, Peoples R China
Li, Ling
[1
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Deng, Qunrui
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South China Normal Univ, Sch Semicond Sci & Technol, Foshan 528225, Peoples R ChinaSouth China Normal Univ, Sch Semicond Sci & Technol, Foshan 528225, Peoples R China
Deng, Qunrui
[1
]
Sun, Yiming
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South China Normal Univ, Sch Semicond Sci & Technol, Foshan 528225, Peoples R ChinaSouth China Normal Univ, Sch Semicond Sci & Technol, Foshan 528225, Peoples R China
Sun, Yiming
[1
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Zhang, Jielian
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South China Normal Univ, Sch Semicond Sci & Technol, Foshan 528225, Peoples R ChinaSouth China Normal Univ, Sch Semicond Sci & Technol, Foshan 528225, Peoples R China
Zhang, Jielian
[1
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Zheng, Tao
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South China Normal Univ, Sch Semicond Sci & Technol, Foshan 528225, Peoples R ChinaSouth China Normal Univ, Sch Semicond Sci & Technol, Foshan 528225, Peoples R China
Zheng, Tao
[1
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Wang, Wenhai
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South China Normal Univ, Sch Semicond Sci & Technol, Foshan 528225, Peoples R ChinaSouth China Normal Univ, Sch Semicond Sci & Technol, Foshan 528225, Peoples R China
Wang, Wenhai
[1
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Pan, Yuan
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South China Normal Univ, Sch Semicond Sci & Technol, Foshan 528225, Peoples R ChinaSouth China Normal Univ, Sch Semicond Sci & Technol, Foshan 528225, Peoples R China
Pan, Yuan
[1
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Gao, Wei
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South China Normal Univ, Sch Semicond Sci & Technol, Foshan 528225, Peoples R ChinaSouth China Normal Univ, Sch Semicond Sci & Technol, Foshan 528225, Peoples R China
Gao, Wei
[1
]
Lu, Jianting
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机构:
Sun Yat sen Univ Guangzhou, Sch Mat Sci & Engn, Guangzhou 510275, Peoples R ChinaSouth China Normal Univ, Sch Semicond Sci & Technol, Foshan 528225, Peoples R China
Lu, Jianting
[2
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Li, Jingbo
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机构:
South China Normal Univ, Sch Semicond Sci & Technol, Foshan 528225, Peoples R China
Zhejiang Univ, Coll Opt Sci & Engn, Hangzhou 310027, Peoples R ChinaSouth China Normal Univ, Sch Semicond Sci & Technol, Foshan 528225, Peoples R China
Li, Jingbo
[1
,3
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Huo, Nengjie
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South China Normal Univ, Sch Semicond Sci & Technol, Foshan 528225, Peoples R China
Guangdong Prov Key Lab Chip & Integrat Technol, Guangzhou 510631, Peoples R ChinaSouth China Normal Univ, Sch Semicond Sci & Technol, Foshan 528225, Peoples R China
Huo, Nengjie
[1
,4
]
机构:
[1] South China Normal Univ, Sch Semicond Sci & Technol, Foshan 528225, Peoples R China
[2] Sun Yat sen Univ Guangzhou, Sch Mat Sci & Engn, Guangzhou 510275, Peoples R China
[3] Zhejiang Univ, Coll Opt Sci & Engn, Hangzhou 310027, Peoples R China
[4] Guangdong Prov Key Lab Chip & Integrat Technol, Guangzhou 510631, Peoples R China
With continuous size scaling, the surface dangling bonds and short-channel effects will degrade silicon based transistor performance. Thus, it is of great importance to seek new channel materials and transistor architectures to further continue Moore's law. Herein, a new ultra-thin short-channel tunneling transistor is developed comprising all 2D- components. Distinct from usual 2D planar transistor, this device is configured with vertical MoS2/WSe2 junction and in-plane WSe2 channel, the switch states are realized by the gate-regulated barrier height of heterojunction, enabling the transition of transport mechanism between thermionic-emission and tunneling. Under dual-gate configuration, the transistor exhibits high performance with drive current of 4.58 & mu;A, on/off ratio of 4 x 10(7), subthreshold swing (SS) of 97 mV decade(-1) and drain-induced barrier lowering (DIBL) of 12 mV V-1, that can meet the requirement of logical applications in integrated circuits (IC). Taking advantage of the high-speed tunneling current and unique short-channel architecture, the device overcomes the issues of voltage spikes and long reverse recovery time that exist in usual electric components, and thus gains an access to the IC interface. This work provides a proof-of-concept transistor architecture relying on dual-gate modulation, opening up a promising perspective for next generation low-power, high-density, and large-scale IC technologies.