A SIMPLE PROCESS FOR THE FABRICATION OF PARALLEL-PLATE ELECTROSTATIC MEMS RESONATORS BY GOLD THERMOCOMPRESSION BONDING

被引：1

作者：

Juarez, Dolores Manrique ^{[1
]}

Mathieu, Fabrice ^{[1
]}

Libaude, Guillaume ^{[1
]}

Bourrier, David ^{[1
]}

Charlot, Samuel ^{[1
]}

Mazenq, Laurent ^{[1
]}

Conedera, Veronique ^{[1
]}

Salvagnac, Ludovic ^{[1
]}

Dufour, Isabelle ^{[2
]}

Nicu, Liviu ^{[1
]}

Leichle, Thierry ^{[1
,3
]}

机构：

[1] LAAS CNRS, Toulouse, France

[2] Univ Bordeaux, Lab IMS, UMR 5218, CNRS, Talence, France

[3] Georgia Tech, Sch Elect & Comp Engn, CNRS, Int Res Lab, Atlanta, GA USA

来源：

2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS | 2023年

关键词：

Micromechanical device; Cantilever; Parallel-plate capacitor; Resonant frequency; Q-factor; Packaging; Thermocompression;

D O I：

10.1109/MEMS49605.2023.10052563

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The present work introduces a simple and quick process for the fabrication of flexural MEMS resonators with electrostatic actuation and capacitive detection. Gold thermocompression is used to anchor the free-standing structure, to provide electrical connections and to seal the chip to protect the structure to be released during wet etching, in a single step. The additional advantage of this process is the ability to simply adjust the gap of the parallel-plate capacitor through the thickness of electroplated gold. Squeeze damping is reduced by fabricating devices with increasing gaps.

引用

页码：643 / 646

页数：4

共 50 条

[21] Resonant pull-in condition in parallel-plate electrostatic actuators
Fargas-Marques, Andreu
Casals-Terte, Jasmina
Shkel, Andrei M.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2007, 16 (05) : 1044 - 1053
[22] Feasible analytical solutions for electrostatic parallel-plate actuator or sensor
Vinokur, RY
JOURNAL OF VIBRATION AND CONTROL, 2004, 10 (03) : 359 - 369
[23] Linearized control of an uniaxial micromirror with electrostatic parallel-plate actuation
Weinberger, Stefan
Tran Trung Nguyen
Lecomte, Romeo
Cheriguen, Yahia
Ament, Christoph
Hoffmann, Martin
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2016, 22 (02): : 441 - 447
[24] Fault Simulation for the Electrostatic Parallel-plate Micro-actuator
Hao, Yongping
Liu, Fengli
2009 INTERNATIONAL FORUM ON INFORMATION TECHNOLOGY AND APPLICATIONS, VOL 1, PROCEEDINGS, 2009, : 614 - 617
[25] Failure Analysis of the Electrostatic Parallel-plate Micro-actuator
Liu, Fengli
Hao, Yongping
2008 7TH WORLD CONGRESS ON INTELLIGENT CONTROL AND AUTOMATION, VOLS 1-23, 2008, : 7702 - 7706
[26] Dynamics of a parallel-plate electrostatic actuator in viscous dielectric media
Burugupally, Sindhu Preetham
Perera, W. Roshantha
SENSORS AND ACTUATORS A-PHYSICAL, 2019, 295 : 366 - 373
[27] A PARALLEL-PLATE ELECTROSTATIC SIZE CLASSIFIER FOR AEROSOL-PARTICLES
SCHOWENGERDT, FD
BROWN, JT
REVIEW OF SCIENTIFIC INSTRUMENTS, 1980, 51 (08): : 1098 - 1104
[28] Linearized control of an uniaxial micromirror with electrostatic parallel-plate actuation
Stefan Weinberger
Tran Trung Nguyen
Roméo Lecomte
Yahia Cheriguen
Christoph Ament
Martin Hoffmann
Microsystem Technologies, 2016, 22 : 441 - 447
[29] Stable periodic oscillations in simple parallel-plate MEMS based on a family of graphene-like materials
Nunez, D.
Galan-Vioque, J.
Murcia, L.
INTERNATIONAL JOURNAL OF NON-LINEAR MECHANICS, 2023, 149
[30] DOUBLE PARALLEL-PLATE ELECTROSTATIC ANALYZER FOR TARA ENDLOSS STUDIES
SULLIVAN, JD
CASEY, JA
IRBY, JH
SMITH, DK
SEVILLANO, E
REVIEW OF SCIENTIFIC INSTRUMENTS, 1986, 57 (08): : 1789 - 1791

← 1 2 3 4 5 →