Fault Simulation for the Electrostatic Parallel-plate Micro-actuator

The fault analysis for the electrostatic parallel-plate is a critical issue in the design flow, as it played an important role in determining device reliability and the voltage required for successful operation. The simulations for pull-in and release voltages were carried in CoventorWare. The FEM model was constructed. The displacement of the upper electrode and corresponding capacitance between the upper and bottom electrode at different voltage are studied. The contact force and the stresses in the movable structure were presented. Electrostatic spring softing analysis interpreted the shift at the resonant frequencies.