Growth of β-Ga2O3 and ε/κ-Ga2O3 on AlN(0001) by molecular-beam epitaxy (vol 11, 111113,2023)

被引:0
|
作者
Raghuvansy, Sushma [1 ]
Mccandless, Jon P. [1 ]
Schowalter, Marco [1 ]
Karg, Alexander [1 ]
Alonso-Orts, Manuel [1 ,3 ]
Williams, Martin S. [1 ]
Tessarek, Christian [1 ]
Figge, Stephan [1 ]
Nomoto, Kazuki [2 ]
Xing, Huili Grace [2 ,4 ]
Schlom, Darrell G. [4 ,5 ,6 ]
Rosenauer, Andreas [1 ,3 ]
Jena, Debdeep [2 ,4 ]
Eickhoff, Martin [1 ,3 ]
Vogt, Patrick [1 ,4 ]
机构
[1] Univ Bremen, Inst Solid State Phys, Otto-Hahn-Allee 1, D-28359 Bremen, Germany
[2] Cornell Univ, Sch Elect & Comp Engn, Ithaca, NY 14853 USA
[3] Univ Bremen, MAPEX Ctr Mat & Proc, D-28359 Bremen, Germany
[4] Cornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
[5] Cornell Univ, Kavli Inst Cornell Nanoscale Sci, Ithaca, NY 14853 USA
[6] Leibniz Inst Kristallzuchtung, Max-Born-Str 2, D-12489 Berlin, Germany
来源
APL MATERIALS | 2024年 / 12卷 / 01期
关键词
D O I
10.1063/5.0192370
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页数:2
相关论文
共 50 条
  • [21] Halide vapor phase epitaxial growth of β-Ga2O3 and α-Ga2O3 films
    Leach, J. H.
    Udwary, K.
    Rumsey, J.
    Dodson, G.
    Splawn, H.
    Evans, K. R.
    APL MATERIALS, 2019, 7 (02):
  • [22] Tin-Assisted Synthesis of ∈-Ga2O3 by Molecular Beam Epitaxy
    Kracht, M.
    Karg, A.
    Schoermann, J.
    Weinhold, M.
    Zink, D.
    Michel, F.
    Rohnke, M.
    Schowalter, M.
    Gerken, B.
    Rosenauer, A.
    Klar, P. J.
    Janek, J.
    Eickhoff, M.
    PHYSICAL REVIEW APPLIED, 2017, 8 (05):
  • [23] Growth and characterization of α-Ga2O3 on sapphire and nanocrystalline β-Ga2O3 on diamond substrates by halide vapor phase epitaxy
    Modak, Sushrut
    Lundh, James Spencer
    Al-Mamun, Nahid Sultan
    Chernyak, Leonid
    Haque, Aman
    Thieu Quang Tu
    Kuramata, Akito
    Tadjer, Marko J.
    Pearton, Stephen J.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2022, 40 (06):
  • [24] Growth of β-Ga2O3 Thin Films on Ga2O3/GaN/Sapphire Template
    Jiao T.
    Li Z.-M.
    Wang Q.
    Dong X.
    Zhang Y.-T.
    Bai S.
    Zhang B.-L.
    Du G.-T.
    Faguang Xuebao/Chinese Journal of Luminescence, 2020, 41 (03): : 281 - 287
  • [25] -Ga2O3
    Modak, Sushrut
    Chernyak, Leonid
    Schulte, Alfons
    Xian, Minghan
    Ren, Fan
    Pearton, Stephen J.
    Ruzin, Arie
    Kosolobov, Sergey S.
    Drachev, Vladimir P.
    AIP ADVANCES, 2021, 11 (12)
  • [26] Twin-induced phase transition from β-Ga2O3 to α-Ga2O3 in Ga2O3 thin films
    Choi, Byeongdae
    Allabergenov, Bunyod
    Lyu, Hong-Kun
    Lee, Seong Eui
    APPLIED PHYSICS EXPRESS, 2018, 11 (06)
  • [27] GA2O3 AND PARTICULATES - THE ORIGINS OF OVAL DEFECTS IN GAAS-RELATED MOLECULAR-BEAM EPITAXY
    WENG, SL
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (03): : 725 - 729
  • [28] Study on the interface electronic properties of AlN(0001)/β-Ga2O3(100)
    He, Xiaomin
    Hu, Jichao
    Zhang, Zihan
    Liu, Wanquan
    Song, Kai
    Meng, Jiaqi
    SURFACES AND INTERFACES, 2022, 28
  • [29] n-type dopants in (001) β-Ga2O3 grown on (001) β-Ga2O3 substrates by plasma-assisted molecular beam epitaxy
    Han, Sang-Heon
    Mauze, Akhil
    Ahmadi, Elaheh
    Mates, Tom
    Oshima, Yuichi
    Speck, James S.
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2018, 33 (04)
  • [30] A comparative study of Ir/Ga2O3, Pt/Ga2O3, and Ru/Ga2O3 catalysts in selective hydrogenation of crotonaldehyde
    Gebauer-Henke, E.
    Farbotko, J.
    Touroude, R.
    Rynkowski, J.
    KINETICS AND CATALYSIS, 2008, 49 (04) : 574 - 580