ELECTRON BEAM EVAPORATION OF SILICON CARBIDE TO PRODUCE SILICON-CARBON COATINGS

被引：0
|
作者：
Burdovitsin, V. A. [1 ]
Bakeev, I. Yu. [1 ]
Ngon, L. J. [1 ]
Kiki, A. [1 ]
Oks, E. M. [1 ]
Tyunkov, A. V. [1 ]
机构：
[1] Tomsk State Univ Control Syst & Radioelect, 40 Lenin Ave, Tomsk 634050, Russia
来源：
HIGH TEMPERATURE MATERIAL PROCESSES | 2025年 / 29卷 / 01期
关键词：
plasma electron source; electron beam evaporation; silicon carbidecoatings; PLASMA;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this paper, we describe our work on the formation of silicon-carbon (Si-C) coatings by electron beam evaporation of a silicon carbide target in a medium vacuum using a forevacuum-pressure plas-ma-cathode electron source. The films obtained were characterized, which showed that the properties of the Si-C coatings were similar to those prepared by plasma-chemical methods.
引用
收藏
页数：8
相关论文
共 50 条
  • [41] Bismuth catalyzed growth of silicon nanowires by electron beam evaporation
    Kumar, R. Rakesh
    Rao, K. Narasimha
    Phani, A. R.
    MATERIALS LETTERS, 2012, 82 : 163 - 166
  • [42] Silicon nanowires prepared by electron beam evaporation in ultrahigh vacuum
    Xiangdong Xu
    Shibin Li
    Yinchuan Wang
    Taijun Fan
    Yadong Jiang
    Long Huang
    Qiong He
    Tianhong Ao
    Nanoscale Research Letters, 7
  • [43] Growth of shape controlled silicon nanowhiskers by electron beam evaporation
    Karakiz, Mehmet
    Toydemir, Burcu
    Unal, Bayram
    Arslan, Leyla Colakerol
    EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2014, 65 (02):
  • [44] Evaporation of phosphorus in molten silicon with electron beam irradiation method
    Hanazawa, K
    Yuge, N
    Hiwasa, S
    Kato, Y
    JOURNAL OF THE JAPAN INSTITUTE OF METALS, 2003, 67 (10) : 569 - 574
  • [45] Low-temperature epitaxy of silicon by electron beam evaporation
    Gorka, B.
    Dogan, P.
    Sieber, I.
    Fenske, F.
    Gall, S.
    THIN SOLID FILMS, 2007, 515 (19) : 7643 - 7646
  • [46] SILICON - THE SILICON-CARBON BOND - ANNUAL SURVEY FOR THE YEAR 1984
    LARSON, GL
    JOURNAL OF ORGANOMETALLIC CHEMISTRY, 1986, 313 (1-3) : 141 - 412
  • [47] Silicon-carbon hybrid [2]-ladderanes
    Lambert, Marcel
    Poitiers, Nadine E.
    Huch, Volker
    Goforth, Andrea
    Scheschkewitz, David
    ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE, 2022, 648 (13):
  • [48] SILICON - THE SILICON-CARBON BOND - ANNUAL SURVEY FOR THE YEAR 1989
    LARSON, GL
    JOURNAL OF ORGANOMETALLIC CHEMISTRY, 1992, 422 (1-3) : 1 - 208
  • [49] ORGANO-SILICON SURVEY 1986 - THE SILICON-CARBON BOND
    LARSON, GL
    JOURNAL OF ORGANOMETALLIC CHEMISTRY, 1989, 360 (1-3) : 39 - 262
  • [50] PHOTOLUMINESCENCE STUDIES ON SILICON-CARBON ALLOYS
    DEMAGALHAES, CS
    BITTENCOURT, C
    TESSLER, LR
    ALVAREZ, F
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1993, 166 : 1027 - 1030
12345